JPS57211047A - Measuring apparatus - Google Patents
Measuring apparatusInfo
- Publication number
- JPS57211047A JPS57211047A JP56096260A JP9626081A JPS57211047A JP S57211047 A JPS57211047 A JP S57211047A JP 56096260 A JP56096260 A JP 56096260A JP 9626081 A JP9626081 A JP 9626081A JP S57211047 A JPS57211047 A JP S57211047A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- irradiated
- crystal
- rocking curve
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To measure a lattice constant in the thickness direction or an inclination variation of the lattice face without touching a sample, by irradiating an ion on the surface of a sample to be inspected and measuring an X-ray rocking curve etching physically. CONSTITUTION:Characteristic X-rays 2 generated from an X-ray generating tube 1 are irradiated to a monochrometer crystal 3 and are collimated monochromatically and then, a part of this monochromatic parallel X-ray 4 is cut by a slit 5. Hereafter, said X-ray 4 is irradiated to a crystal to be inspected 8 through an X-ray window provided to a vacuum vessel 6. An X-ray rocking curve is obtained by recording the intensity of detected diffraction X-ray by an X-ray detector 10 rotating the crystal 8 slowly. After this curve is measured, the surface of an epitaxial layer 82 is etched physically by an ion beam 12 of hellium, etc. irradiated from an ion gun 11 which is provided to the inner part of a vacuum vessel 6 and after that, the X-ray rocking curve is measured again.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56096260A JPS57211047A (en) | 1981-06-22 | 1981-06-22 | Measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56096260A JPS57211047A (en) | 1981-06-22 | 1981-06-22 | Measuring apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57211047A true JPS57211047A (en) | 1982-12-24 |
Family
ID=14160210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56096260A Pending JPS57211047A (en) | 1981-06-22 | 1981-06-22 | Measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57211047A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6188131A (en) * | 1984-10-05 | 1986-05-06 | Shimadzu Corp | X-ray microanalyzer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49129589A (en) * | 1973-04-13 | 1974-12-11 |
-
1981
- 1981-06-22 JP JP56096260A patent/JPS57211047A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49129589A (en) * | 1973-04-13 | 1974-12-11 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6188131A (en) * | 1984-10-05 | 1986-05-06 | Shimadzu Corp | X-ray microanalyzer |
JPH0736005B2 (en) * | 1984-10-05 | 1995-04-19 | 株式会社島津製作所 | Surface layer analysis method |
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