JPS57205342A - Glass photomask - Google Patents
Glass photomaskInfo
- Publication number
- JPS57205342A JPS57205342A JP9190981A JP9190981A JPS57205342A JP S57205342 A JPS57205342 A JP S57205342A JP 9190981 A JP9190981 A JP 9190981A JP 9190981 A JP9190981 A JP 9190981A JP S57205342 A JPS57205342 A JP S57205342A
- Authority
- JP
- Japan
- Prior art keywords
- film
- glass
- sio
- metallic
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/3665—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as photomask
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
PURPOSE: To obtain a glass photomask almost free from pinholes and having enhanced pattern accuracy by forming an oxide film on glass having an SiO2 film, further forming an electroless plated metallic film, and carrying out patterning.
CONSTITUTION: A film of SiO2, Ta2O5 or a mixture thereof is laid on each glass substrate, and on the film an oxide film of ≥1 kind of oxide selected from SnO2, In2O3, Sb3O5, TiO2, Ta2O5, Nb2O5, SiO2, GeO2 and ZrO2 is formed. On the oxide film a metallic film is formed by electroless plating. This metallic film is patterned in the desired shape by a prescribed method. At this time, by forming the oxide film by the hydrolysis of metallic alkoxide, the adhesive strength of the plated film is enhanced. By this method a large number of glass photomasks free from ≥10μm pinholes and having high pattern accuracy are obtd. inexpensively.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9190981A JPS57205342A (en) | 1981-06-15 | 1981-06-15 | Glass photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9190981A JPS57205342A (en) | 1981-06-15 | 1981-06-15 | Glass photomask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57205342A true JPS57205342A (en) | 1982-12-16 |
JPS643256B2 JPS643256B2 (en) | 1989-01-20 |
Family
ID=14039702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9190981A Granted JPS57205342A (en) | 1981-06-15 | 1981-06-15 | Glass photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57205342A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280655A (en) * | 1985-10-04 | 1987-04-14 | Toppan Printing Co Ltd | Photomask blank and photomask |
JPH05241721A (en) * | 1992-02-27 | 1993-09-21 | Totoku Electric Co Ltd | Transparent digitizer sensor plate |
-
1981
- 1981-06-15 JP JP9190981A patent/JPS57205342A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6280655A (en) * | 1985-10-04 | 1987-04-14 | Toppan Printing Co Ltd | Photomask blank and photomask |
JPH0414339B2 (en) * | 1985-10-04 | 1992-03-12 | Toppan Printing Co Ltd | |
JPH05241721A (en) * | 1992-02-27 | 1993-09-21 | Totoku Electric Co Ltd | Transparent digitizer sensor plate |
Also Published As
Publication number | Publication date |
---|---|
JPS643256B2 (en) | 1989-01-20 |
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