JPS57201169A - Holder for extremely thin fragile deformable wafer used in grinder - Google Patents
Holder for extremely thin fragile deformable wafer used in grinderInfo
- Publication number
- JPS57201169A JPS57201169A JP57084680A JP8468082A JPS57201169A JP S57201169 A JPS57201169 A JP S57201169A JP 57084680 A JP57084680 A JP 57084680A JP 8468082 A JP8468082 A JP 8468082A JP S57201169 A JPS57201169 A JP S57201169A
- Authority
- JP
- Japan
- Prior art keywords
- grinder
- holder
- extremely thin
- wafer used
- thin fragile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8110182A FR2505713A1 (en) | 1981-05-18 | 1981-05-18 | Semiconductor wafer carrying head for polishing machine - has circular disc covered in thin tissue with reduced pressure behind tissue to hold wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57201169A true JPS57201169A (en) | 1982-12-09 |
Family
ID=9258756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57084680A Pending JPS57201169A (en) | 1981-05-18 | 1982-05-18 | Holder for extremely thin fragile deformable wafer used in grinder |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS57201169A (en) |
FR (1) | FR2505713A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5997856U (en) * | 1982-12-18 | 1984-07-03 | 豊田工機株式会社 | wrap device |
JPS63124460U (en) * | 1987-02-07 | 1988-08-12 | ||
JP2007053949A (en) * | 2005-08-24 | 2007-03-08 | Shimano Inc | Landing net handle and its plug |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184727A (en) * | 1982-04-23 | 1983-10-28 | Disco Abrasive Sys Ltd | Processing apparatus for semiconductor material and satin-finished surface thereof |
JP2610703B2 (en) * | 1990-09-05 | 1997-05-14 | 住友電気工業株式会社 | Method for manufacturing semiconductor device |
EP0805000A1 (en) * | 1996-05-02 | 1997-11-05 | MEMC Electronic Materials, Inc. | Semiconductor wafer post-polish clean and dry method and apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3977130A (en) * | 1975-05-12 | 1976-08-31 | Semimetals, Inc. | Removal-compensating polishing apparatus |
US4194324A (en) * | 1978-01-16 | 1980-03-25 | Siltec Corporation | Semiconductor wafer polishing machine and wafer carrier therefor |
-
1981
- 1981-05-18 FR FR8110182A patent/FR2505713A1/en active Granted
-
1982
- 1982-05-18 JP JP57084680A patent/JPS57201169A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5997856U (en) * | 1982-12-18 | 1984-07-03 | 豊田工機株式会社 | wrap device |
JPS6237629Y2 (en) * | 1982-12-18 | 1987-09-25 | ||
JPS63124460U (en) * | 1987-02-07 | 1988-08-12 | ||
JP2007053949A (en) * | 2005-08-24 | 2007-03-08 | Shimano Inc | Landing net handle and its plug |
Also Published As
Publication number | Publication date |
---|---|
FR2505713B1 (en) | 1985-01-11 |
FR2505713A1 (en) | 1982-11-19 |
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