JPS57199948A - Preparation of humidity-sensitive element - Google Patents

Preparation of humidity-sensitive element

Info

Publication number
JPS57199948A
JPS57199948A JP56085451A JP8545181A JPS57199948A JP S57199948 A JPS57199948 A JP S57199948A JP 56085451 A JP56085451 A JP 56085451A JP 8545181 A JP8545181 A JP 8545181A JP S57199948 A JPS57199948 A JP S57199948A
Authority
JP
Japan
Prior art keywords
humidity
sensitive
powder
resin powder
burning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56085451A
Other languages
Japanese (ja)
Inventor
Hidefusa Uchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56085451A priority Critical patent/JPS57199948A/en
Publication of JPS57199948A publication Critical patent/JPS57199948A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Abstract

PURPOSE:To obtain an element having good humidity-sensitive characteristics at a low burning temperature, by burning resin powder or carbon powder after the resin powder or the carbonaceous powder is incorporated and dispersed in an organosilicon compound polymer. CONSTITUTION:Silicone varnish dissolved an early stage polymer of methylphenyl silicon (silicone resin) in xylene is used for a starting raw material and a 10wt% finely powdered epoxy resin based on the whole body is incorporated and the resulting product is kneaded. Hereafter, this kneaded materials is formed on an alumina insulation substrate 3 in a filmy state and a humidity-sensitive part 4 is made by burning at 300-600 deg.C. A pair of Au electrodes 1 are vapor- deposited on the part 4 to obtain a humidity sensitive element. The epoxy resin powder is decomposed and burned as the burning temperature is raised to >=300 deg.C and the surface of the part 4 is made porous and then, the humidity- sensitive characteristics are improved. Further, said characteristics are saturated at >=600 deg.C being considered that the epoxy resin powder is perfectly burned.
JP56085451A 1981-06-03 1981-06-03 Preparation of humidity-sensitive element Pending JPS57199948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56085451A JPS57199948A (en) 1981-06-03 1981-06-03 Preparation of humidity-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56085451A JPS57199948A (en) 1981-06-03 1981-06-03 Preparation of humidity-sensitive element

Publications (1)

Publication Number Publication Date
JPS57199948A true JPS57199948A (en) 1982-12-08

Family

ID=13859241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56085451A Pending JPS57199948A (en) 1981-06-03 1981-06-03 Preparation of humidity-sensitive element

Country Status (1)

Country Link
JP (1) JPS57199948A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0329436A2 (en) * 1988-02-19 1989-08-23 Asahi Kasei Kogyo Kabushiki Kaisha Moisture and dew-detection sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0329436A2 (en) * 1988-02-19 1989-08-23 Asahi Kasei Kogyo Kabushiki Kaisha Moisture and dew-detection sensor

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