JPS57196210A - Sample holding device - Google Patents

Sample holding device

Info

Publication number
JPS57196210A
JPS57196210A JP8105081A JP8105081A JPS57196210A JP S57196210 A JPS57196210 A JP S57196210A JP 8105081 A JP8105081 A JP 8105081A JP 8105081 A JP8105081 A JP 8105081A JP S57196210 A JPS57196210 A JP S57196210A
Authority
JP
Japan
Prior art keywords
plastic film
film
electrodes
wound
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8105081A
Other languages
Japanese (ja)
Other versions
JPH024884B2 (en
Inventor
Kiyoshi Ishikawa
Kageyoshi Katakura
Hiroshi Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8105081A priority Critical patent/JPS57196210A/en
Publication of JPS57196210A publication Critical patent/JPS57196210A/en
Publication of JPH024884B2 publication Critical patent/JPH024884B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To make it possible that a plastic film of an electrostatic chuck endures the long-time use, by constituting this plastic film interchangeably. CONSTITUTION:Electrodes 13 and 14 have upper faces polished flat and are connected to a power source 22 through lead wires 15 and 16. A plastic film 17 is wound into a roll and is brought into contact with electrodes 13 and 14 by a press roller 18, and a tensile stress is applied to the plastic film 17 so as to cover electrodes 13 and 14, and the plastic film 17 is wound up by a take-up part 19. When a sample 20 is put on this electrostatic chuck and positive and negative voltages are applied to both electrodes, the sample 20 is fixed by electrostatic force. If the film 17 is damaged or a dielectric breakdown occurs, the film is wound up by the take-up part 19 to lead out an unused part, and it exhibits its capacity again, and thus, the film 17 endures the long-time use.
JP8105081A 1981-05-29 1981-05-29 Sample holding device Granted JPS57196210A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8105081A JPS57196210A (en) 1981-05-29 1981-05-29 Sample holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8105081A JPS57196210A (en) 1981-05-29 1981-05-29 Sample holding device

Publications (2)

Publication Number Publication Date
JPS57196210A true JPS57196210A (en) 1982-12-02
JPH024884B2 JPH024884B2 (en) 1990-01-30

Family

ID=13735580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8105081A Granted JPS57196210A (en) 1981-05-29 1981-05-29 Sample holding device

Country Status (1)

Country Link
JP (1) JPS57196210A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715329A (en) * 1985-04-09 1987-12-29 Nissan Motor Co., Ltd. Induction system for internal combustion engine
JPH08274150A (en) * 1995-03-31 1996-10-18 Nec Corp Electrostatic attracting stage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715329A (en) * 1985-04-09 1987-12-29 Nissan Motor Co., Ltd. Induction system for internal combustion engine
JPH08274150A (en) * 1995-03-31 1996-10-18 Nec Corp Electrostatic attracting stage

Also Published As

Publication number Publication date
JPH024884B2 (en) 1990-01-30

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