JPS57196210A - Sample holding device - Google Patents
Sample holding deviceInfo
- Publication number
- JPS57196210A JPS57196210A JP8105081A JP8105081A JPS57196210A JP S57196210 A JPS57196210 A JP S57196210A JP 8105081 A JP8105081 A JP 8105081A JP 8105081 A JP8105081 A JP 8105081A JP S57196210 A JPS57196210 A JP S57196210A
- Authority
- JP
- Japan
- Prior art keywords
- plastic film
- film
- electrodes
- wound
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Microscoopes, Condenser (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To make it possible that a plastic film of an electrostatic chuck endures the long-time use, by constituting this plastic film interchangeably. CONSTITUTION:Electrodes 13 and 14 have upper faces polished flat and are connected to a power source 22 through lead wires 15 and 16. A plastic film 17 is wound into a roll and is brought into contact with electrodes 13 and 14 by a press roller 18, and a tensile stress is applied to the plastic film 17 so as to cover electrodes 13 and 14, and the plastic film 17 is wound up by a take-up part 19. When a sample 20 is put on this electrostatic chuck and positive and negative voltages are applied to both electrodes, the sample 20 is fixed by electrostatic force. If the film 17 is damaged or a dielectric breakdown occurs, the film is wound up by the take-up part 19 to lead out an unused part, and it exhibits its capacity again, and thus, the film 17 endures the long-time use.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8105081A JPS57196210A (en) | 1981-05-29 | 1981-05-29 | Sample holding device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8105081A JPS57196210A (en) | 1981-05-29 | 1981-05-29 | Sample holding device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57196210A true JPS57196210A (en) | 1982-12-02 |
JPH024884B2 JPH024884B2 (en) | 1990-01-30 |
Family
ID=13735580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8105081A Granted JPS57196210A (en) | 1981-05-29 | 1981-05-29 | Sample holding device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57196210A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4715329A (en) * | 1985-04-09 | 1987-12-29 | Nissan Motor Co., Ltd. | Induction system for internal combustion engine |
JPH08274150A (en) * | 1995-03-31 | 1996-10-18 | Nec Corp | Electrostatic attracting stage |
-
1981
- 1981-05-29 JP JP8105081A patent/JPS57196210A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4715329A (en) * | 1985-04-09 | 1987-12-29 | Nissan Motor Co., Ltd. | Induction system for internal combustion engine |
JPH08274150A (en) * | 1995-03-31 | 1996-10-18 | Nec Corp | Electrostatic attracting stage |
Also Published As
Publication number | Publication date |
---|---|
JPH024884B2 (en) | 1990-01-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GR60571B (en) | Galvanic primary element with alkaline electrolyte and anhydrophobic air electrode | |
AR217630A1 (en) | COMPOSITION OF MATERIAL INCLUDING ELECTROLYTES USED IN ELECTRICAL DEVICES, OF THE TYPE OF ELECTROCHEMICAL BATTERIES, AND ELECTROCHEMICAL BATTERY CONTAINING IT | |
GB2022270B (en) | Monitoring battery voltage | |
JPS6482020A (en) | Electrooptic apparatus | |
IT7924431A0 (en) | ELECTRODE FOR AN ELECTROCHEMICAL CELL AND ELECTROCHEMICAL CELL. | |
AU518999B2 (en) | Electrochemical device with solid separator and solid electrolyte | |
US4860159A (en) | Tape dispenser with static neutralizer | |
DK0409616T3 (en) | Coiled electrode assembly for an electrochemical cell | |
JPS57196210A (en) | Sample holding device | |
GB2056752B (en) | Electrochemical cell having electrolyte comprising halogens and interhalogens | |
JPS5570877A (en) | Display unit and method of driving same | |
JPS5526558A (en) | Photo switch | |
JPS5336648A (en) | Electrochemical generator having auxiliary negative electrode | |
JPS57196211A (en) | Sample holding device | |
HK45380A (en) | Positive active material for an electrochemical cell | |
IT1209845B (en) | GRINDING ELECTRODE AND METHOD AND DEVICE FOR THE ELECTROCHEMICAL GRINDING OF A CONDUCTIVE PIECE WITH ELECTRODE CANVAS | |
JPS5772261A (en) | Button type alkaline battery | |
JPS56144453A (en) | Method and device for charging | |
EP0019919A3 (en) | Electrochemical display device | |
ES364629A1 (en) | Alkaline galvanic cell | |
JPS5763556A (en) | Feeder for moving body | |
IT1166828B (en) | PROCEDURE AND RELATED DEVICE FOR ELECTROCHEMICALLY DETECTING THE DISCHARGE AND CHARGE CONDITION OF ELECTRIC ACCUMULATORS | |
JPH07201314A (en) | Cylindrical dry battery | |
ZA784059B (en) | Electrode for an electrochemical cell and an electrochemical cell | |
JPS56164361A (en) | Electrphotographic copier |