JPS57195917A - Air bearing - Google Patents

Air bearing

Info

Publication number
JPS57195917A
JPS57195917A JP7919681A JP7919681A JPS57195917A JP S57195917 A JPS57195917 A JP S57195917A JP 7919681 A JP7919681 A JP 7919681A JP 7919681 A JP7919681 A JP 7919681A JP S57195917 A JPS57195917 A JP S57195917A
Authority
JP
Japan
Prior art keywords
wafer
arrow
conveying surface
air
extraneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7919681A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Isamu Seki
Kazumi Adachi
Hiroshi Maejima
Seiichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Hitachi Ome Electronic Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd, Hitachi Ome Electronic Co Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP7919681A priority Critical patent/JPS57195917A/en
Publication of JPS57195917A publication Critical patent/JPS57195917A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To cleanly convey an article, by providing an extraneous substance removing means in a part of an article conveying surface. CONSTITUTION:A wafer delivered onto the wafer conveying surface 12 of a wafer conveying plate 10 is carried to a next process in the direction of an arrow B by air obliquely ejected out of air oulet holes 14. If extraneous substances such as dust and wafer chips are delivered together from the preceding process, the extraneous substances gather mostly at the coupling corners of the wafer conveying plate 10 and guide walls 16 and are removed to the outside through slits 18 in the direction of an arrow C. In that case, clean air may be supplied downward in the direction of an arrow D over the wafer conveying surface 12 to heighten the effect of the removal of the extraneous substances through the slits 18.
JP7919681A 1981-05-27 1981-05-27 Air bearing Pending JPS57195917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7919681A JPS57195917A (en) 1981-05-27 1981-05-27 Air bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7919681A JPS57195917A (en) 1981-05-27 1981-05-27 Air bearing

Publications (1)

Publication Number Publication Date
JPS57195917A true JPS57195917A (en) 1982-12-01

Family

ID=13683212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7919681A Pending JPS57195917A (en) 1981-05-27 1981-05-27 Air bearing

Country Status (1)

Country Link
JP (1) JPS57195917A (en)

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