JPS57187606A - Method and device for automatically discovering error of flat figure - Google Patents
Method and device for automatically discovering error of flat figureInfo
- Publication number
- JPS57187606A JPS57187606A JP6523782A JP6523782A JPS57187606A JP S57187606 A JPS57187606 A JP S57187606A JP 6523782 A JP6523782 A JP 6523782A JP 6523782 A JP6523782 A JP 6523782A JP S57187606 A JPS57187606 A JP S57187606A
- Authority
- JP
- Japan
- Prior art keywords
- flat
- automatically discovering
- error
- discovering error
- automatically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813118646 DE3118646A1 (en) | 1981-05-11 | 1981-05-11 | Method and device for automatically detecting defects in planar patterns |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57187606A true JPS57187606A (en) | 1982-11-18 |
Family
ID=6132001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6523782A Pending JPS57187606A (en) | 1981-05-11 | 1982-04-19 | Method and device for automatically discovering error of flat figure |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS57187606A (en) |
DE (1) | DE3118646A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6093305A (en) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | Method for mask examination |
JPS60166809A (en) * | 1984-02-10 | 1985-08-30 | Toshiba Corp | Defect inspecting device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3314465A1 (en) * | 1983-04-21 | 1984-10-25 | Robert Bosch Gmbh, 7000 Stuttgart | Optical surface testing method |
-
1981
- 1981-05-11 DE DE19813118646 patent/DE3118646A1/en not_active Withdrawn
-
1982
- 1982-04-19 JP JP6523782A patent/JPS57187606A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6093305A (en) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | Method for mask examination |
JPH0417361B2 (en) * | 1983-10-27 | 1992-03-25 | Fujitsu Ltd | |
JPS60166809A (en) * | 1984-02-10 | 1985-08-30 | Toshiba Corp | Defect inspecting device |
JPH047808B2 (en) * | 1984-02-10 | 1992-02-13 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
DE3118646A1 (en) | 1982-12-02 |
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