JPS57186075A - Cryo-pump and operating method thereof - Google Patents
Cryo-pump and operating method thereofInfo
- Publication number
- JPS57186075A JPS57186075A JP7014781A JP7014781A JPS57186075A JP S57186075 A JPS57186075 A JP S57186075A JP 7014781 A JP7014781 A JP 7014781A JP 7014781 A JP7014781 A JP 7014781A JP S57186075 A JPS57186075 A JP S57186075A
- Authority
- JP
- Japan
- Prior art keywords
- shield
- pump
- cooling
- flange
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
PURPOSE:To improve the efficiency by constructing such that the exhaust gas pressure of a cyro-pump to be used for achieving the vacuum and a cylinder at the cooling end of a refrigerator are separatable in the heat transmission from a liquid nitrogen cooling shield thereby shortening the cooling time of the exhaust face during the operation. CONSTITUTION:The screw in a screw driver 13 is rotated to move the tubular sections 10, 11 in the direction to shorten the gap. Consequently the cylinders 3a, 4a at the cooling end and a flange 9 are moved upward while maintaining the air-tightness through a bellows 12 to contact the flange 9 with the opening 6' of a shield 6 thereby said cylinder 4a and the exhaust face 2 are pre-cooled through the heat transmission with the shield 6. After the pre-cooling, the screw of the device 13 is rotated reversely to lower the tubular section 11 thus to separate the flange 9 from the shield 6. With such structure the cooling time of the exhaust face 2 during the operation of the cryo-pump is shortened to improve the pump efficiency.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7014781A JPS57186075A (en) | 1981-05-12 | 1981-05-12 | Cryo-pump and operating method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7014781A JPS57186075A (en) | 1981-05-12 | 1981-05-12 | Cryo-pump and operating method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57186075A true JPS57186075A (en) | 1982-11-16 |
JPS6119832B2 JPS6119832B2 (en) | 1986-05-19 |
Family
ID=13423164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7014781A Granted JPS57186075A (en) | 1981-05-12 | 1981-05-12 | Cryo-pump and operating method thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57186075A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59186491U (en) * | 1983-05-30 | 1984-12-11 | アルバツク・クライオ株式会社 | Pump case in cryopump |
JPS606892U (en) * | 1983-06-28 | 1985-01-18 | アルパツク・クライオ株式会社 | Small helium cryopump |
US5305612A (en) * | 1992-07-06 | 1994-04-26 | Ebara Technologies Incorporated | Cryopump method and apparatus |
JP2009158649A (en) * | 2007-12-26 | 2009-07-16 | Nitto Electric Works Ltd | Box for storing electric apparatus |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01118912A (en) * | 1987-10-30 | 1989-05-11 | Brother Ind Ltd | Holding mechanism for display device |
JPH0238995U (en) * | 1988-09-06 | 1990-03-15 |
-
1981
- 1981-05-12 JP JP7014781A patent/JPS57186075A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59186491U (en) * | 1983-05-30 | 1984-12-11 | アルバツク・クライオ株式会社 | Pump case in cryopump |
JPS606892U (en) * | 1983-06-28 | 1985-01-18 | アルパツク・クライオ株式会社 | Small helium cryopump |
US5305612A (en) * | 1992-07-06 | 1994-04-26 | Ebara Technologies Incorporated | Cryopump method and apparatus |
JP2009158649A (en) * | 2007-12-26 | 2009-07-16 | Nitto Electric Works Ltd | Box for storing electric apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6119832B2 (en) | 1986-05-19 |
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