JPS57184901A - Correcting device for degree of straight of straight travelling table - Google Patents
Correcting device for degree of straight of straight travelling tableInfo
- Publication number
- JPS57184901A JPS57184901A JP56068888A JP6888881A JPS57184901A JP S57184901 A JPS57184901 A JP S57184901A JP 56068888 A JP56068888 A JP 56068888A JP 6888881 A JP6888881 A JP 6888881A JP S57184901 A JPS57184901 A JP S57184901A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- straight
- travelling table
- measuring reference
- side air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
- B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
- B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
PURPOSE:To perform an easy correction of a travelling table to a high-precise degree of straight, by a method wherein a set value coincides with a displacement through adjustment of a fluid pressure fed to side static pressure fluid bearings mounted in a plural number of spots at both sides of the travelling direction of the travelling table. CONSTITUTION:Two measuring reference blocks 12a and 12b are mounted at one side of a Y-direction, being perpendicular to an X-direction of a travelling table 2 and at a distance in the X-direction. A displacement meter 12a is situated facing and opposite to the measuring reference block 12a and in the proximity of a bearing 6a of two side air bearings 6a and 6b, and a displacement meter 13b is located facing and opposite to the measuring reference block 12b and in the proximity of a side air bearing 6c of side air bearings 6c and 6d. In the two displacement meters 13a and 13b, for example, an electrostatic capacity type non-contact minute displacement meter is employed to detect a minute displacement of an object as a change in electrostatic capacity, and this permits the measurement of a minute displacement of 0.1mum or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56068888A JPS57184901A (en) | 1981-05-09 | 1981-05-09 | Correcting device for degree of straight of straight travelling table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56068888A JPS57184901A (en) | 1981-05-09 | 1981-05-09 | Correcting device for degree of straight of straight travelling table |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57184901A true JPS57184901A (en) | 1982-11-13 |
JPH0157286B2 JPH0157286B2 (en) | 1989-12-05 |
Family
ID=13386640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56068888A Granted JPS57184901A (en) | 1981-05-09 | 1981-05-09 | Correcting device for degree of straight of straight travelling table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57184901A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224009A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three dimensional automatic measuring machine |
JPS62257008A (en) * | 1986-04-30 | 1987-11-09 | Tokyo Seimitsu Co Ltd | Bridge-shaped moving apparatus |
JPH07302742A (en) * | 1994-02-14 | 1995-11-14 | Canon Inc | Scanning type aligner |
JP2011257232A (en) * | 2010-06-08 | 2011-12-22 | Denso Corp | Balance measurement device for rotor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397859A (en) * | 1977-02-08 | 1978-08-26 | Fujitsu Ltd | Plane positioning shifter |
JPS53125055A (en) * | 1977-04-07 | 1978-11-01 | Masakazu Miyashita | Micro position finder |
-
1981
- 1981-05-09 JP JP56068888A patent/JPS57184901A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397859A (en) * | 1977-02-08 | 1978-08-26 | Fujitsu Ltd | Plane positioning shifter |
JPS53125055A (en) * | 1977-04-07 | 1978-11-01 | Masakazu Miyashita | Micro position finder |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60224009A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three dimensional automatic measuring machine |
JPH0349364B2 (en) * | 1984-04-20 | 1991-07-29 | Mitutoyo Corp | |
JPS62257008A (en) * | 1986-04-30 | 1987-11-09 | Tokyo Seimitsu Co Ltd | Bridge-shaped moving apparatus |
JPH07302742A (en) * | 1994-02-14 | 1995-11-14 | Canon Inc | Scanning type aligner |
JP2567811B2 (en) * | 1994-02-14 | 1996-12-25 | キヤノン株式会社 | Scanning exposure device |
JP2011257232A (en) * | 2010-06-08 | 2011-12-22 | Denso Corp | Balance measurement device for rotor |
Also Published As
Publication number | Publication date |
---|---|
JPH0157286B2 (en) | 1989-12-05 |
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