JPS5717144A - Evaluation of film quality for wiring metal film in semiconductor device - Google Patents

Evaluation of film quality for wiring metal film in semiconductor device

Info

Publication number
JPS5717144A
JPS5717144A JP9174480A JP9174480A JPS5717144A JP S5717144 A JPS5717144 A JP S5717144A JP 9174480 A JP9174480 A JP 9174480A JP 9174480 A JP9174480 A JP 9174480A JP S5717144 A JPS5717144 A JP S5717144A
Authority
JP
Japan
Prior art keywords
electrode
potential
sample
wiring metal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9174480A
Other languages
Japanese (ja)
Other versions
JPS5832781B2 (en
Inventor
Osamu Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9174480A priority Critical patent/JPS5832781B2/en
Publication of JPS5717144A publication Critical patent/JPS5717144A/en
Publication of JPS5832781B2 publication Critical patent/JPS5832781B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To evaluate the film quality of a wiring metal film by putting a standard electrode and an electrode working as a tested sample in a strong acid etching solution wherein the electric potential generated by the electrodes is detected by a potentiostud. CONSTITUTION:With an aluminum standard electrode 4 and an aluminum measuring sample 5 immersed in an aqueous strong acid solution 2, etching is started. At that time, a natural electrode potential is generated between a platinum electrode 3 and the sample 5 and the potential is recorded by a recorder 9 through a potentiometer 7. Furthermore, a natural electrode potential is simultaneously generated between the electrode 4 and the sample 5 and the potential is recorded by a recorder 10 through a potentiometer 8. The above potentials vary by etching process. Therefore, measured samples can be tested by checking the values by the recorders 9, 10.
JP9174480A 1980-07-07 1980-07-07 Film quality evaluation method for metal films for semiconductor device wiring Expired JPS5832781B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9174480A JPS5832781B2 (en) 1980-07-07 1980-07-07 Film quality evaluation method for metal films for semiconductor device wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9174480A JPS5832781B2 (en) 1980-07-07 1980-07-07 Film quality evaluation method for metal films for semiconductor device wiring

Publications (2)

Publication Number Publication Date
JPS5717144A true JPS5717144A (en) 1982-01-28
JPS5832781B2 JPS5832781B2 (en) 1983-07-15

Family

ID=14035032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9174480A Expired JPS5832781B2 (en) 1980-07-07 1980-07-07 Film quality evaluation method for metal films for semiconductor device wiring

Country Status (1)

Country Link
JP (1) JPS5832781B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602750U (en) * 1983-06-21 1985-01-10 ダイキン工業株式会社 air conditioning duct

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238618Y2 (en) * 1984-10-24 1987-10-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602750U (en) * 1983-06-21 1985-01-10 ダイキン工業株式会社 air conditioning duct

Also Published As

Publication number Publication date
JPS5832781B2 (en) 1983-07-15

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