JPS57165080A - Device for manufacturing semiconductor integrated circuit - Google Patents
Device for manufacturing semiconductor integrated circuitInfo
- Publication number
- JPS57165080A JPS57165080A JP56050153A JP5015381A JPS57165080A JP S57165080 A JPS57165080 A JP S57165080A JP 56050153 A JP56050153 A JP 56050153A JP 5015381 A JP5015381 A JP 5015381A JP S57165080 A JPS57165080 A JP S57165080A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- manufacturing semiconductor
- manufacturing
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56050153A JPS57165080A (en) | 1981-04-03 | 1981-04-03 | Device for manufacturing semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56050153A JPS57165080A (en) | 1981-04-03 | 1981-04-03 | Device for manufacturing semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57165080A true JPS57165080A (en) | 1982-10-09 |
Family
ID=12851232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56050153A Pending JPS57165080A (en) | 1981-04-03 | 1981-04-03 | Device for manufacturing semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57165080A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026355A (en) * | 1973-03-07 | 1975-03-19 |
-
1981
- 1981-04-03 JP JP56050153A patent/JPS57165080A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5026355A (en) * | 1973-03-07 | 1975-03-19 |
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