JPS57165080A - Device for manufacturing semiconductor integrated circuit - Google Patents

Device for manufacturing semiconductor integrated circuit

Info

Publication number
JPS57165080A
JPS57165080A JP56050153A JP5015381A JPS57165080A JP S57165080 A JPS57165080 A JP S57165080A JP 56050153 A JP56050153 A JP 56050153A JP 5015381 A JP5015381 A JP 5015381A JP S57165080 A JPS57165080 A JP S57165080A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
manufacturing semiconductor
manufacturing
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56050153A
Other languages
Japanese (ja)
Inventor
Seiichi Morishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56050153A priority Critical patent/JPS57165080A/en
Publication of JPS57165080A publication Critical patent/JPS57165080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP56050153A 1981-04-03 1981-04-03 Device for manufacturing semiconductor integrated circuit Pending JPS57165080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56050153A JPS57165080A (en) 1981-04-03 1981-04-03 Device for manufacturing semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56050153A JPS57165080A (en) 1981-04-03 1981-04-03 Device for manufacturing semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS57165080A true JPS57165080A (en) 1982-10-09

Family

ID=12851232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56050153A Pending JPS57165080A (en) 1981-04-03 1981-04-03 Device for manufacturing semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS57165080A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026355A (en) * 1973-03-07 1975-03-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5026355A (en) * 1973-03-07 1975-03-19

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