JPS57156311A - Production of alpha-type silicon nitride powder - Google Patents

Production of alpha-type silicon nitride powder

Info

Publication number
JPS57156311A
JPS57156311A JP3727181A JP3727181A JPS57156311A JP S57156311 A JPS57156311 A JP S57156311A JP 3727181 A JP3727181 A JP 3727181A JP 3727181 A JP3727181 A JP 3727181A JP S57156311 A JPS57156311 A JP S57156311A
Authority
JP
Japan
Prior art keywords
silicon nitride
alpha
production
powder
type silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3727181A
Other languages
Japanese (ja)
Other versions
JPS5932402B2 (en
Inventor
Akihiko Tsuge
Hiroshi Inoue
Katsutoshi Yoneya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3727181A priority Critical patent/JPS5932402B2/en
Publication of JPS57156311A publication Critical patent/JPS57156311A/en
Publication of JPS5932402B2 publication Critical patent/JPS5932402B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0685—Preparation by carboreductive nitridation

Abstract

PURPOSE: A mixture resultant from adding Si3N4, SiC and silicon oxynitride to CH3SiCl3 by prescribed amounts is hydrolyzed and subjected to reductive nitriding in a nitrogen gas atmosphere at a prescribed temperature to increase the yield of silicon nitride.
CONSTITUTION: CH3SiCl3 in an amount corresponding to 1pt.wt. SiO2 is combined with 0.1W0.3 carbon powder and 0.005W1pt. at least one selected from Si3N4 powder, SiC powder and silicon oxynitride to prepare a liquid mixture. The mixture is hydrolyzed, washed and dried to give granules. The resultant granules are finely pulverized and heated in a nitrogen atmosphere at 1,300W 1,500°C to effect reductive nitriding.
COPYRIGHT: (C)1982,JPO&Japio
JP3727181A 1981-03-17 1981-03-17 Method for producing α-type silicon nitride powder Expired JPS5932402B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3727181A JPS5932402B2 (en) 1981-03-17 1981-03-17 Method for producing α-type silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3727181A JPS5932402B2 (en) 1981-03-17 1981-03-17 Method for producing α-type silicon nitride powder

Publications (2)

Publication Number Publication Date
JPS57156311A true JPS57156311A (en) 1982-09-27
JPS5932402B2 JPS5932402B2 (en) 1984-08-08

Family

ID=12493004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3727181A Expired JPS5932402B2 (en) 1981-03-17 1981-03-17 Method for producing α-type silicon nitride powder

Country Status (1)

Country Link
JP (1) JPS5932402B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626422A (en) * 1985-06-24 1986-12-02 Gte Products Corporation High purity high surface area silicon nitride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626422A (en) * 1985-06-24 1986-12-02 Gte Products Corporation High purity high surface area silicon nitride

Also Published As

Publication number Publication date
JPS5932402B2 (en) 1984-08-08

Similar Documents

Publication Publication Date Title
JPS53102300A (en) Preparation of type silicon nitride powders
JPS5238500A (en) Production of alpha-silicon nitride powder
JPS5257100A (en) Method for production of sintered material of silicon nitride system
JPS57156318A (en) Production of trichlorosilane
JPS54124898A (en) Preparation of silicon nitride
JPS57156311A (en) Production of alpha-type silicon nitride powder
JPS5562804A (en) Production of nitride
JPS54126697A (en) Production of aluminum nitride powder
JPS5692109A (en) Manufacture of alpha-type silicon nitride powder
JPS5567514A (en) High purity alpha-type silicon nitride and production thereof
JPS54134099A (en) Production of silicon nitride
JPS5651651A (en) Humidity-sensitive semiconductor element and its manufacture
JPS57209811A (en) Preparation of alpha-si3n4 impalpable powder
JPS5433300A (en) Preparation of silicon carbide
JPS55140710A (en) Manufacture of silicon carbide fine powder
JPS53149933A (en) Preparation of methyl hydrogen polysilane
JPS55140711A (en) Manufacture of silicon carbide powder
JPS5398779A (en) Manufacture for silicon oxide film
JPS5742517A (en) Preparation of silicon nitride powder
JPS54134098A (en) Preparing silicon nitride
JPS57156316A (en) Production of silicon carbide powder
JPS57139064A (en) Preparation of indole
JPS5226023A (en) Combustion process with minimized excess air
JPS5560010A (en) Production of silicon nitride
JPS56169119A (en) Manufacture of trichlorosilane