JPS57153473A - Semiconductor device with input and output protective circuit and its manufacturing method - Google Patents
Semiconductor device with input and output protective circuit and its manufacturing methodInfo
- Publication number
- JPS57153473A JPS57153473A JP56038545A JP3854581A JPS57153473A JP S57153473 A JPS57153473 A JP S57153473A JP 56038545 A JP56038545 A JP 56038545A JP 3854581 A JP3854581 A JP 3854581A JP S57153473 A JPS57153473 A JP S57153473A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- source
- drain
- input
- field oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 229920005591 polysilicon Polymers 0.000 abstract 2
- 229910018125 Al-Si Inorganic materials 0.000 abstract 1
- 229910018520 Al—Si Inorganic materials 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Amplifiers (AREA)
Abstract
PURPOSE:To obtain superb input and output protective property by superposing a source or a drain layer immediately below the edge of a polysilicon gate electrode on a field oxide film. CONSTITUTION:A field oxide film 12 and an oixde film 13 are formed on the face (1,000) of a P type silicon and a window 14 is made connecting to the field oxide film. Then a source 16 and a drain 17 are formed by diffusing P covering a polysilicon 15, and a gate electrode 15 is patterned. A source 18 and a drain 19 of an ordinary FET are formed by diffusing from AsSG after removing the oxide film 13. The as does not cuase a short channel because of the short diffusion distance. The source and drain of FETA are exteded to the area right below the edge of the gate layer 20 by P over the entire surface which prevents an usual off-set. After this Al-Si 22 is formed on the opening of the oxide film 21 as usual and the device is completed with a protective film 23 and electrodes take-out pads and others. This construction makes an IC having superb protective property of input and output.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56038545A JPS57153473A (en) | 1981-03-17 | 1981-03-17 | Semiconductor device with input and output protective circuit and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56038545A JPS57153473A (en) | 1981-03-17 | 1981-03-17 | Semiconductor device with input and output protective circuit and its manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57153473A true JPS57153473A (en) | 1982-09-22 |
Family
ID=12528253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56038545A Pending JPS57153473A (en) | 1981-03-17 | 1981-03-17 | Semiconductor device with input and output protective circuit and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57153473A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01194474A (en) * | 1988-01-29 | 1989-08-04 | Nec Corp | Semiconductor input protecting device |
WO1999013510A1 (en) * | 1997-09-11 | 1999-03-18 | Micrel, Incorporated | Esd protection technique using mos transistor with thick gate oxide |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5160470A (en) * | 1974-11-22 | 1976-05-26 | Mitsubishi Electric Corp | ZETSUENGEETOHANDOTAISOCHINO SEIZOHOHO |
JPS5598867A (en) * | 1979-01-19 | 1980-07-28 | Mitsubishi Electric Corp | Protecting device |
-
1981
- 1981-03-17 JP JP56038545A patent/JPS57153473A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5160470A (en) * | 1974-11-22 | 1976-05-26 | Mitsubishi Electric Corp | ZETSUENGEETOHANDOTAISOCHINO SEIZOHOHO |
JPS5598867A (en) * | 1979-01-19 | 1980-07-28 | Mitsubishi Electric Corp | Protecting device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01194474A (en) * | 1988-01-29 | 1989-08-04 | Nec Corp | Semiconductor input protecting device |
WO1999013510A1 (en) * | 1997-09-11 | 1999-03-18 | Micrel, Incorporated | Esd protection technique using mos transistor with thick gate oxide |
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