JPS57146311A - Temperature controller - Google Patents

Temperature controller

Info

Publication number
JPS57146311A
JPS57146311A JP56030912A JP3091281A JPS57146311A JP S57146311 A JPS57146311 A JP S57146311A JP 56030912 A JP56030912 A JP 56030912A JP 3091281 A JP3091281 A JP 3091281A JP S57146311 A JPS57146311 A JP S57146311A
Authority
JP
Japan
Prior art keywords
temperature
output
temperatures
gives
cooling air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56030912A
Other languages
Japanese (ja)
Inventor
Yoshio Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56030912A priority Critical patent/JPS57146311A/en
Publication of JPS57146311A publication Critical patent/JPS57146311A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G05D23/1904—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value variable in time

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)

Abstract

PURPOSE:To increase reliability, by making temperature control to each one arithmetic device, a detecting device and an output device with a plurality of input devices. CONSTITUTION:Temperatures t1 and t2 are set with the 1st temperature setter 3. When a temperature detector 1 detects a cooling air temperature and inputs it to an operation device 2, the device 2 judges if the temperature at the detector is lower or higher than the temperatures t1 and t2, and gives instruction of ON- OFF to an output device 4. The temperature of cooling air is controlled by operating or stopping a refrigerator by this ON-OFF signal. Temperatures t3 and t4 at the 2nd temperature setter 5 are set similarly as in the case of the 1st temperature setter 3. For example, when the temperature regulator starts control, the output device 4 gives no OFF output until the temperature of cooling air reaches the t4 and the OFF output is given at the t4. Even if the cooling air rises to the t3 through the stopping of the refrigerator, the output device 4 gives no ON output and gives the ON output at the t1. Thereafter, control making ON-OFF output is made between the temperatures t1 and t2.
JP56030912A 1981-03-03 1981-03-03 Temperature controller Pending JPS57146311A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56030912A JPS57146311A (en) 1981-03-03 1981-03-03 Temperature controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56030912A JPS57146311A (en) 1981-03-03 1981-03-03 Temperature controller

Publications (1)

Publication Number Publication Date
JPS57146311A true JPS57146311A (en) 1982-09-09

Family

ID=12316906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56030912A Pending JPS57146311A (en) 1981-03-03 1981-03-03 Temperature controller

Country Status (1)

Country Link
JP (1) JPS57146311A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243441A (en) * 2010-05-12 2011-11-16 上海微电子装备有限公司 Temperature control device, projection exposure device using temperature control device, and temperature control method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861878A (en) * 1971-11-30 1973-08-29
JPS50130995A (en) * 1974-04-05 1975-10-16
JPS5321386A (en) * 1976-08-10 1978-02-27 Toshiba Corp Process controlling system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861878A (en) * 1971-11-30 1973-08-29
JPS50130995A (en) * 1974-04-05 1975-10-16
JPS5321386A (en) * 1976-08-10 1978-02-27 Toshiba Corp Process controlling system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243441A (en) * 2010-05-12 2011-11-16 上海微电子装备有限公司 Temperature control device, projection exposure device using temperature control device, and temperature control method

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