JPS57132113A - Method and device for pattern formation using laser - Google Patents

Method and device for pattern formation using laser

Info

Publication number
JPS57132113A
JPS57132113A JP56016848A JP1684881A JPS57132113A JP S57132113 A JPS57132113 A JP S57132113A JP 56016848 A JP56016848 A JP 56016848A JP 1684881 A JP1684881 A JP 1684881A JP S57132113 A JPS57132113 A JP S57132113A
Authority
JP
Japan
Prior art keywords
edge
slit
plates
semicircle
spots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56016848A
Other languages
Japanese (ja)
Other versions
JPS6258484B2 (en
Inventor
Hiroshi Yamaguchi
Takeoki Miyauchi
Masao Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56016848A priority Critical patent/JPS57132113A/en
Publication of JPS57132113A publication Critical patent/JPS57132113A/en
Publication of JPS6258484B2 publication Critical patent/JPS6258484B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To form an accurate edge although the edge of an irradiation pattern cross obliquely the deflected scanning direction, by turning an intermediate slit so that an image of the intermediate slit edge formed by an objective lens is in contact with the edge of the pattern to be formed. CONSTITUTION:A pair of slit plates 20a and 20b are formed into a semicircle having a chord of a linear edge. The circumference of the semicircle is supported by circular guides 23a and 23b and in a rotatable way centering on the center spots 21a and 21b of the edge. The scanning line (j) of the laser beam crosses a slit plate at the spots 21a and 21b. The width (b') with the scanning width limited by the plates 20a and 20b has no change although the plates 20a and 20b are turned centering on the intersections 21a and 21b by a motor 35 via gears 33 and 32. Accordingly the edge direction of the slit plate can be freely controlled.
JP56016848A 1981-02-09 1981-02-09 Method and device for pattern formation using laser Granted JPS57132113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56016848A JPS57132113A (en) 1981-02-09 1981-02-09 Method and device for pattern formation using laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56016848A JPS57132113A (en) 1981-02-09 1981-02-09 Method and device for pattern formation using laser

Publications (2)

Publication Number Publication Date
JPS57132113A true JPS57132113A (en) 1982-08-16
JPS6258484B2 JPS6258484B2 (en) 1987-12-07

Family

ID=11927626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56016848A Granted JPS57132113A (en) 1981-02-09 1981-02-09 Method and device for pattern formation using laser

Country Status (1)

Country Link
JP (1) JPS57132113A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61262477A (en) * 1985-05-17 1986-11-20 Nippon Seiko Kk Machining by laser beam
JPH01133693A (en) * 1987-11-20 1989-05-25 Kawasaki Steel Corp Laser beam machine
US6384371B1 (en) 1998-10-15 2002-05-07 Fanuc Ltd. Laser beam machining apparatus
CN102596483A (en) * 2009-08-11 2012-07-18 万佳雷射有限公司 Capacitive touch panels
CN103212796A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Two-dimensional-motion platform device applicable to laser micromachining of thin-walled tubes

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61262477A (en) * 1985-05-17 1986-11-20 Nippon Seiko Kk Machining by laser beam
JPH01133693A (en) * 1987-11-20 1989-05-25 Kawasaki Steel Corp Laser beam machine
JPH0371235B2 (en) * 1987-11-20 1991-11-12 Kawasaki Seitetsu Kk
US6384371B1 (en) 1998-10-15 2002-05-07 Fanuc Ltd. Laser beam machining apparatus
CN102596483A (en) * 2009-08-11 2012-07-18 万佳雷射有限公司 Capacitive touch panels
CN103212796A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Two-dimensional-motion platform device applicable to laser micromachining of thin-walled tubes

Also Published As

Publication number Publication date
JPS6258484B2 (en) 1987-12-07

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