JPS57130423A - Apparatus for pattern inspection - Google Patents
Apparatus for pattern inspectionInfo
- Publication number
- JPS57130423A JPS57130423A JP1573681A JP1573681A JPS57130423A JP S57130423 A JPS57130423 A JP S57130423A JP 1573681 A JP1573681 A JP 1573681A JP 1573681 A JP1573681 A JP 1573681A JP S57130423 A JPS57130423 A JP S57130423A
- Authority
- JP
- Japan
- Prior art keywords
- unit pattern
- pattern
- judged
- unit
- inspection section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title abstract 6
- 230000007547 defect Effects 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To inspect the quality of unit pattern rapidly and surely by a method wherein the existence of the common defect in the unit pattern is inspected in an absolute inspection section and one unit pattern is compared with the other in turn in a relative inspection section. CONSTITUTION:A first unit pattern P1 is focused onto a linear imaging sensor 6 to recognize the configuration of the pattern P1. On the other hand, the data for forming a reticle is taken from a memory 12 and the foregoing two signals are input to a comparator 11. Since the comparator 11 is set in a comparable condition for constituting an absolute inspection section 15, the pattern signal P1 is compared with the data for forming a reticle, therefore only when the both are determined identical, the pattern P1 is judged to be acceptable. When the both are different from each other, the comparison, is continued for the unit pattern P2 which sequentially follow until a unit pattern judged to be acceptable is obtained. At the inspection for a plurality of unit patterns, when the unit pattern judged to be good may be detected, thereafter the compararator 11 serves as a relative inspection section 14 and a next unit pattern is inspected using the unit pattern judged to be acceptable as a reference.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1573681A JPS57130423A (en) | 1981-02-06 | 1981-02-06 | Apparatus for pattern inspection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1573681A JPS57130423A (en) | 1981-02-06 | 1981-02-06 | Apparatus for pattern inspection |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57130423A true JPS57130423A (en) | 1982-08-12 |
Family
ID=11897037
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1573681A Pending JPS57130423A (en) | 1981-02-06 | 1981-02-06 | Apparatus for pattern inspection |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57130423A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6093305A (en) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | Method for mask examination |
JPS6147635A (en) * | 1984-08-14 | 1986-03-08 | Nippon Jido Seigyo Kk | Pattern inspection method using pattern defect inspection apparatus |
JPS61180432A (en) * | 1985-02-06 | 1986-08-13 | Hitachi Ltd | Inspection of pattern |
JPH02126142A (en) * | 1988-11-04 | 1990-05-15 | Nichizou Tec:Kk | Can coating inspecting device |
JP2004212218A (en) * | 2002-12-27 | 2004-07-29 | Toshiba Corp | Sample inspection method and inspection apparatus |
-
1981
- 1981-02-06 JP JP1573681A patent/JPS57130423A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6093305A (en) * | 1983-10-27 | 1985-05-25 | Fujitsu Ltd | Method for mask examination |
JPH0417361B2 (en) * | 1983-10-27 | 1992-03-25 | Fujitsu Ltd | |
JPS6147635A (en) * | 1984-08-14 | 1986-03-08 | Nippon Jido Seigyo Kk | Pattern inspection method using pattern defect inspection apparatus |
JPS61180432A (en) * | 1985-02-06 | 1986-08-13 | Hitachi Ltd | Inspection of pattern |
JPH02126142A (en) * | 1988-11-04 | 1990-05-15 | Nichizou Tec:Kk | Can coating inspecting device |
JP2004212218A (en) * | 2002-12-27 | 2004-07-29 | Toshiba Corp | Sample inspection method and inspection apparatus |
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