JPS57126966A - Formation of thin film using mask - Google Patents
Formation of thin film using maskInfo
- Publication number
- JPS57126966A JPS57126966A JP1205081A JP1205081A JPS57126966A JP S57126966 A JPS57126966 A JP S57126966A JP 1205081 A JP1205081 A JP 1205081A JP 1205081 A JP1205081 A JP 1205081A JP S57126966 A JPS57126966 A JP S57126966A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- thickness
- opening
- film
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Heads (AREA)
Abstract
PURPOSE:To generate difference of a film thickness to a film only by once mask fitting and adhesion of the film by partially differentiating a thickness or a shape in the peripheral part of a mask opening. CONSTITUTION:An opening 71 is provided to the mask 63 and the peripheral part of said opening is constituted, for example, from a part with a thickness of about 150mu and a part with a thickness of about 50mu. When sputtering of an alloy is carried out by using said mask 63, a permalloy alloy thin film 21 of which the thickness is about 4mu at a part under the opening encircled by the thick mask peripheral part and about 6mu at a part under the opening encircled by the thin mask peripheral part is formed. As described above, only by once film formation using the mask, the thin film of which the thickness is partially different can be formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1205081A JPS57126966A (en) | 1981-01-29 | 1981-01-29 | Formation of thin film using mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1205081A JPS57126966A (en) | 1981-01-29 | 1981-01-29 | Formation of thin film using mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57126966A true JPS57126966A (en) | 1982-08-06 |
Family
ID=11794765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1205081A Pending JPS57126966A (en) | 1981-01-29 | 1981-01-29 | Formation of thin film using mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57126966A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5971115A (en) * | 1982-10-15 | 1984-04-21 | Hitachi Ltd | Thin film head for vertical magnetic recording and reproduction |
JPS6333555A (en) * | 1986-07-25 | 1988-02-13 | Anelva Corp | Mask device for producing thin film recording medium |
-
1981
- 1981-01-29 JP JP1205081A patent/JPS57126966A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5971115A (en) * | 1982-10-15 | 1984-04-21 | Hitachi Ltd | Thin film head for vertical magnetic recording and reproduction |
JPH0520802B2 (en) * | 1982-10-15 | 1993-03-22 | Hitachi Ltd | |
JPS6333555A (en) * | 1986-07-25 | 1988-02-13 | Anelva Corp | Mask device for producing thin film recording medium |
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