JPS57125871A - Electron detector - Google Patents

Electron detector

Info

Publication number
JPS57125871A
JPS57125871A JP1208681A JP1208681A JPS57125871A JP S57125871 A JPS57125871 A JP S57125871A JP 1208681 A JP1208681 A JP 1208681A JP 1208681 A JP1208681 A JP 1208681A JP S57125871 A JPS57125871 A JP S57125871A
Authority
JP
Japan
Prior art keywords
scintillator
opening part
pipe
metallic pipe
aluminium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1208681A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1208681A priority Critical patent/JPS57125871A/en
Publication of JPS57125871A publication Critical patent/JPS57125871A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers

Abstract

PURPOSE:To obtain a high-sensitivity and strong detector, by converting photoelectrically the light, which is generated from a scintillator provided in the aperture part of one end of a metallic pipe where aluminum is coated on the polished inside face, at the other end of this pipe. CONSTITUTION:Aluminium is vaccum deposited to the inside surface of a metallic pipe 1, and the opening part of one end is cut slantwise, and a scintillator 3 is fitted to this opening part through a supporting member 2. Aluminium is vapor-deposited to the electron incident surface (the right surface in figure). The light generated from the scintillator 3 travels in the metallic pipe 1 and is led out from the opening part of the other end of the pipe 1. The opening part of the other end is connected to a cylindrical material 4, and a disc-shaped glass plate 5 is arranged in the material 4 to close the opening of the connection part, and a photoelectric transducer 6 such as a photomultiplier is arranged in the left of the glass plate 5. Electronic incident to the scintillator 3 are detected by the output electric signal of the photoelectric transducer 6. Thus, a high- sensitive and strong detector is formed.
JP1208681A 1981-01-29 1981-01-29 Electron detector Pending JPS57125871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1208681A JPS57125871A (en) 1981-01-29 1981-01-29 Electron detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1208681A JPS57125871A (en) 1981-01-29 1981-01-29 Electron detector

Publications (1)

Publication Number Publication Date
JPS57125871A true JPS57125871A (en) 1982-08-05

Family

ID=11795767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1208681A Pending JPS57125871A (en) 1981-01-29 1981-01-29 Electron detector

Country Status (1)

Country Link
JP (1) JPS57125871A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7109484B2 (en) 2000-07-27 2006-09-19 Ebara Corporation Sheet beam-type inspection apparatus
US7135676B2 (en) 2000-06-27 2006-11-14 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7241993B2 (en) 2000-06-27 2007-07-10 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7135676B2 (en) 2000-06-27 2006-11-14 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7241993B2 (en) 2000-06-27 2007-07-10 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7297949B2 (en) 2000-06-27 2007-11-20 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7411191B2 (en) 2000-06-27 2008-08-12 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7601972B2 (en) 2000-06-27 2009-10-13 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US8053726B2 (en) 2000-06-27 2011-11-08 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US8368031B2 (en) 2000-06-27 2013-02-05 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US8803103B2 (en) 2000-06-27 2014-08-12 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US9368314B2 (en) 2000-06-27 2016-06-14 Ebara Corporation Inspection system by charged particle beam and method of manufacturing devices using the system
US7109484B2 (en) 2000-07-27 2006-09-19 Ebara Corporation Sheet beam-type inspection apparatus
US7417236B2 (en) 2000-07-27 2008-08-26 Ebara Corporation Sheet beam-type testing apparatus
US7829871B2 (en) 2000-07-27 2010-11-09 Ebara Corporation Sheet beam-type testing apparatus

Similar Documents

Publication Publication Date Title
JPS5770476A (en) Radiation detector
EP0838859A3 (en) Photoelectric conversion apparatus with signal correction capability
SE7414315L (en)
US3068359A (en) Scintillator component
CA2030008A1 (en) Light-receiving device
JPS57125871A (en) Electron detector
US4914349A (en) Photo-electric conversion tube with optical fiber plate
WO2002010796A1 (en) Radiation sensor
JPS5855778A (en) Detector for radiant ray
JPS57156528A (en) Image detector using infrared rays
US3053982A (en) Scintillation meter components and photomultiplier tubes therefor
JPS6463886A (en) Radiation sensor
JPS5730378A (en) Semiconductor photodetector
JPS5944678A (en) Radiant ray detector
JPS57137870A (en) Detection method for alpha-ray radioactive nuclide
US2967935A (en) Scintillation detector
JPS53120393A (en) Photo signal amplifier
JPS5675602A (en) Photoelectric power detector for optical fiber
JPS57128082A (en) Light-receiving element
JPS57119275A (en) Discriminating circuit for radiation detecting wave form
JPS5488176A (en) Photo detector
JPS57145256A (en) Electrostatic focussing type image tube
JPS6478185A (en) Radiation detecting element
JPS57156575A (en) Radiation detector and sampler
JPH1090419A (en) Optical fiber utilizing radiation detector