JPS5680383A - Beam current control device - Google Patents

Beam current control device

Info

Publication number
JPS5680383A
JPS5680383A JP15767279A JP15767279A JPS5680383A JP S5680383 A JPS5680383 A JP S5680383A JP 15767279 A JP15767279 A JP 15767279A JP 15767279 A JP15767279 A JP 15767279A JP S5680383 A JPS5680383 A JP S5680383A
Authority
JP
Japan
Prior art keywords
cathode
control device
controlled
current control
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15767279A
Other languages
English (en)
Other versions
JPS6321306B2 (ja
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15767279A priority Critical patent/JPS5680383A/ja
Publication of JPS5680383A publication Critical patent/JPS5680383A/ja
Publication of JPS6321306B2 publication Critical patent/JPS6321306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP15767279A 1979-12-05 1979-12-05 Beam current control device Granted JPS5680383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15767279A JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15767279A JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Publications (2)

Publication Number Publication Date
JPS5680383A true JPS5680383A (en) 1981-07-01
JPS6321306B2 JPS6321306B2 (ja) 1988-05-06

Family

ID=15654850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15767279A Granted JPS5680383A (en) 1979-12-05 1979-12-05 Beam current control device

Country Status (1)

Country Link
JP (1) JPS5680383A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226753A (ja) * 1985-07-26 1987-02-04 ラジエイシヨン　ダイナミツクス　インコ−ポレ−テツド 光学リンクを用いたパルス幅変調式電子ビ−ム制御装置及び方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935150U (ja) * 1972-06-24 1974-03-28
JPS507797U (ja) * 1973-05-21 1975-01-27
JPS51131999A (en) * 1975-04-04 1976-11-16 Leybold Heraeus Verwaltung Device for controlling output of high pressure electron beam generator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935150U (ja) * 1972-06-24 1974-03-28
JPS507797U (ja) * 1973-05-21 1975-01-27
JPS51131999A (en) * 1975-04-04 1976-11-16 Leybold Heraeus Verwaltung Device for controlling output of high pressure electron beam generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6226753A (ja) * 1985-07-26 1987-02-04 ラジエイシヨン　ダイナミツクス　インコ−ポレ−テツド 光学リンクを用いたパルス幅変調式電子ビ−ム制御装置及び方法

Also Published As

Publication number Publication date
JPS6321306B2 (ja) 1988-05-06

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