JPS5679224A - Diaphragm with strain gauge - Google Patents

Diaphragm with strain gauge

Info

Publication number
JPS5679224A
JPS5679224A JP15643480A JP15643480A JPS5679224A JP S5679224 A JPS5679224 A JP S5679224A JP 15643480 A JP15643480 A JP 15643480A JP 15643480 A JP15643480 A JP 15643480A JP S5679224 A JPS5679224 A JP S5679224A
Authority
JP
Japan
Prior art keywords
diaphragm
strain gauge
gauge
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15643480A
Other languages
Japanese (ja)
Inventor
Potsupinga Manfuretsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5679224A publication Critical patent/JPS5679224A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP15643480A 1979-11-09 1980-11-06 Diaphragm with strain gauge Pending JPS5679224A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792945359 DE2945359A1 (en) 1979-11-09 1979-11-09 Pressure transducer strain gauge measurement bridge connections - are doped semiconducting tracks with additional ion implantations

Publications (1)

Publication Number Publication Date
JPS5679224A true JPS5679224A (en) 1981-06-29

Family

ID=6085621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15643480A Pending JPS5679224A (en) 1979-11-09 1980-11-06 Diaphragm with strain gauge

Country Status (2)

Country Link
JP (1) JPS5679224A (en)
DE (1) DE2945359A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413782A (en) * 1977-07-01 1979-02-01 Nippon Denso Co Ltd Semiconductor device
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
JPS6143868A (en) * 1984-08-07 1986-03-03 Nec Corp Facsimile transmitter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413782A (en) * 1977-07-01 1979-02-01 Nippon Denso Co Ltd Semiconductor device
JPS54138384A (en) * 1978-04-19 1979-10-26 Mitsubishi Electric Corp Semiconductor pressure converter
JPS6143868A (en) * 1984-08-07 1986-03-03 Nec Corp Facsimile transmitter

Also Published As

Publication number Publication date
DE2945359A1 (en) 1981-05-14

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