JPS5679224A - Diaphragm with strain gauge - Google Patents
Diaphragm with strain gaugeInfo
- Publication number
- JPS5679224A JPS5679224A JP15643480A JP15643480A JPS5679224A JP S5679224 A JPS5679224 A JP S5679224A JP 15643480 A JP15643480 A JP 15643480A JP 15643480 A JP15643480 A JP 15643480A JP S5679224 A JPS5679224 A JP S5679224A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- strain gauge
- gauge
- strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19792945359 DE2945359A1 (en) | 1979-11-09 | 1979-11-09 | Pressure transducer strain gauge measurement bridge connections - are doped semiconducting tracks with additional ion implantations |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5679224A true JPS5679224A (en) | 1981-06-29 |
Family
ID=6085621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15643480A Pending JPS5679224A (en) | 1979-11-09 | 1980-11-06 | Diaphragm with strain gauge |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5679224A (en) |
DE (1) | DE2945359A1 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5413782A (en) * | 1977-07-01 | 1979-02-01 | Nippon Denso Co Ltd | Semiconductor device |
JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
JPS6143868A (en) * | 1984-08-07 | 1986-03-03 | Nec Corp | Facsimile transmitter |
-
1979
- 1979-11-09 DE DE19792945359 patent/DE2945359A1/en not_active Withdrawn
-
1980
- 1980-11-06 JP JP15643480A patent/JPS5679224A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5413782A (en) * | 1977-07-01 | 1979-02-01 | Nippon Denso Co Ltd | Semiconductor device |
JPS54138384A (en) * | 1978-04-19 | 1979-10-26 | Mitsubishi Electric Corp | Semiconductor pressure converter |
JPS6143868A (en) * | 1984-08-07 | 1986-03-03 | Nec Corp | Facsimile transmitter |
Also Published As
Publication number | Publication date |
---|---|
DE2945359A1 (en) | 1981-05-14 |
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