JPS5678278A - Deflecting circuit of scanning type electron microscope or the like - Google Patents

Deflecting circuit of scanning type electron microscope or the like

Info

Publication number
JPS5678278A
JPS5678278A JP15510379A JP15510379A JPS5678278A JP S5678278 A JPS5678278 A JP S5678278A JP 15510379 A JP15510379 A JP 15510379A JP 15510379 A JP15510379 A JP 15510379A JP S5678278 A JPS5678278 A JP S5678278A
Authority
JP
Japan
Prior art keywords
voltage
amplifier
period
electric power
deflecting coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15510379A
Other languages
Japanese (ja)
Other versions
JPS5928314B2 (en
Inventor
Katsuji Sawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15510379A priority Critical patent/JPS5928314B2/en
Publication of JPS5678278A publication Critical patent/JPS5678278A/en
Publication of JPS5928314B2 publication Critical patent/JPS5928314B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Details Of Television Scanning (AREA)

Abstract

PURPOSE:To decrease the electric power voltage of an amplifier and to reduce the electric power consumption of a transistor by applying a high voltage to a deflecting coil only durig a flyback period. CONSTITUTION:Output voltage V3 of amplifier 3 is set a little bit higher than a voltage required during a scanning period and much lower than electric power voltage V1 of amplifier 3. Consequently, correct scanning current is supplied to deflecting coil 2 in scanning period t2. In flyback period t1, switches 5 and 6 are placed at the contact A side and voltage V1 is applied to the input of complementary circuit 1, so that transistor Q1 will turn on to apply voltage V2 to deflecting coil 2 as it is. Therefore, flyback current rising sharply flows through deflecting coil 2 during the period. Consequently, low voltage V3 is enough as the output voltage of amplifier 3 and during the scanning period, any high voltage is not applied to transistor Q1, so that the electric power consumption is reduced greatly.
JP15510379A 1979-11-30 1979-11-30 Deflection circuits in scanning electron microscopes, etc. Expired JPS5928314B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15510379A JPS5928314B2 (en) 1979-11-30 1979-11-30 Deflection circuits in scanning electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15510379A JPS5928314B2 (en) 1979-11-30 1979-11-30 Deflection circuits in scanning electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5678278A true JPS5678278A (en) 1981-06-27
JPS5928314B2 JPS5928314B2 (en) 1984-07-12

Family

ID=15598676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15510379A Expired JPS5928314B2 (en) 1979-11-30 1979-11-30 Deflection circuits in scanning electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5928314B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228897A (en) * 1989-03-02 1990-09-11 Sharp Corp Vertical deflection circuit
JPH02266691A (en) * 1989-04-06 1990-10-31 Sharp Corp Vertical deflection circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02228897A (en) * 1989-03-02 1990-09-11 Sharp Corp Vertical deflection circuit
JPH02266691A (en) * 1989-04-06 1990-10-31 Sharp Corp Vertical deflection circuit

Also Published As

Publication number Publication date
JPS5928314B2 (en) 1984-07-12

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