JPS5662737A - Fine machining method - Google Patents
Fine machining methodInfo
- Publication number
- JPS5662737A JPS5662737A JP13605579A JP13605579A JPS5662737A JP S5662737 A JPS5662737 A JP S5662737A JP 13605579 A JP13605579 A JP 13605579A JP 13605579 A JP13605579 A JP 13605579A JP S5662737 A JPS5662737 A JP S5662737A
- Authority
- JP
- Japan
- Prior art keywords
- metal hydride
- alloy
- metallic material
- hydrogen gas
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
PURPOSE: To form a fine groove, orifice or the like in a metallic material with ease by utilizing a phenomenon that a metal hydride is pulverized in the repeated process of adsorption and release of hydrogen.
CONSTITUTION: A substance 2 which easily produces a metal hydride is added through vaporization to the desired part of the metallic material 1 to which groove machining or hole boring is to be applied. Next, the vaporized substance 2 and the metallic material 1 are made into an alloy 3 by the application of heating-diffusion treatment in a vacuum. This alloy 3 produces the metal hydride 4 by introducing the hydrogen gas which has prescribed pressure and temperature capable of producing the metal hydride. After that, the hydrogen gas is removed from the reacting atmosphere and is made to release the hydrogen. In the course of repeated process from the introduction of the hydrogen gas to the removal thereof, a pulverizing phenomenon is caused in the place where the metal hydride is produced, the part of alloy slips out, and the groove or orifice 5 is formed in the metallic mateial 1.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13605579A JPS5662737A (en) | 1979-10-22 | 1979-10-22 | Fine machining method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13605579A JPS5662737A (en) | 1979-10-22 | 1979-10-22 | Fine machining method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5662737A true JPS5662737A (en) | 1981-05-28 |
Family
ID=15166121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13605579A Pending JPS5662737A (en) | 1979-10-22 | 1979-10-22 | Fine machining method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5662737A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5350484A (en) * | 1992-09-08 | 1994-09-27 | Intel Corporation | Method for the anisotropic etching of metal films in the fabrication of interconnects |
-
1979
- 1979-10-22 JP JP13605579A patent/JPS5662737A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5350484A (en) * | 1992-09-08 | 1994-09-27 | Intel Corporation | Method for the anisotropic etching of metal films in the fabrication of interconnects |
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