JPS5662737A - Fine machining method - Google Patents

Fine machining method

Info

Publication number
JPS5662737A
JPS5662737A JP13605579A JP13605579A JPS5662737A JP S5662737 A JPS5662737 A JP S5662737A JP 13605579 A JP13605579 A JP 13605579A JP 13605579 A JP13605579 A JP 13605579A JP S5662737 A JPS5662737 A JP S5662737A
Authority
JP
Japan
Prior art keywords
metal hydride
alloy
metallic material
hydrogen gas
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13605579A
Other languages
Japanese (ja)
Inventor
Toshihiko Odohira
Sadato Shigemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP13605579A priority Critical patent/JPS5662737A/en
Publication of JPS5662737A publication Critical patent/JPS5662737A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form a fine groove, orifice or the like in a metallic material with ease by utilizing a phenomenon that a metal hydride is pulverized in the repeated process of adsorption and release of hydrogen.
CONSTITUTION: A substance 2 which easily produces a metal hydride is added through vaporization to the desired part of the metallic material 1 to which groove machining or hole boring is to be applied. Next, the vaporized substance 2 and the metallic material 1 are made into an alloy 3 by the application of heating-diffusion treatment in a vacuum. This alloy 3 produces the metal hydride 4 by introducing the hydrogen gas which has prescribed pressure and temperature capable of producing the metal hydride. After that, the hydrogen gas is removed from the reacting atmosphere and is made to release the hydrogen. In the course of repeated process from the introduction of the hydrogen gas to the removal thereof, a pulverizing phenomenon is caused in the place where the metal hydride is produced, the part of alloy slips out, and the groove or orifice 5 is formed in the metallic mateial 1.
COPYRIGHT: (C)1981,JPO&Japio
JP13605579A 1979-10-22 1979-10-22 Fine machining method Pending JPS5662737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13605579A JPS5662737A (en) 1979-10-22 1979-10-22 Fine machining method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13605579A JPS5662737A (en) 1979-10-22 1979-10-22 Fine machining method

Publications (1)

Publication Number Publication Date
JPS5662737A true JPS5662737A (en) 1981-05-28

Family

ID=15166121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13605579A Pending JPS5662737A (en) 1979-10-22 1979-10-22 Fine machining method

Country Status (1)

Country Link
JP (1) JPS5662737A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350484A (en) * 1992-09-08 1994-09-27 Intel Corporation Method for the anisotropic etching of metal films in the fabrication of interconnects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350484A (en) * 1992-09-08 1994-09-27 Intel Corporation Method for the anisotropic etching of metal films in the fabrication of interconnects

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