JPS5660677A - Ultrasonic washer - Google Patents

Ultrasonic washer

Info

Publication number
JPS5660677A
JPS5660677A JP13718879A JP13718879A JPS5660677A JP S5660677 A JPS5660677 A JP S5660677A JP 13718879 A JP13718879 A JP 13718879A JP 13718879 A JP13718879 A JP 13718879A JP S5660677 A JPS5660677 A JP S5660677A
Authority
JP
Japan
Prior art keywords
ultrasonic washer
washer
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13718879A
Other languages
Japanese (ja)
Inventor
Toshio Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nishihara Environment Co Ltd
Original Assignee
Nishihara Environmental Sanitation Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nishihara Environmental Sanitation Research Corp filed Critical Nishihara Environmental Sanitation Research Corp
Priority to JP13718879A priority Critical patent/JPS5660677A/en
Publication of JPS5660677A publication Critical patent/JPS5660677A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP13718879A 1979-10-23 1979-10-23 Ultrasonic washer Pending JPS5660677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13718879A JPS5660677A (en) 1979-10-23 1979-10-23 Ultrasonic washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13718879A JPS5660677A (en) 1979-10-23 1979-10-23 Ultrasonic washer

Publications (1)

Publication Number Publication Date
JPS5660677A true JPS5660677A (en) 1981-05-25

Family

ID=15192849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13718879A Pending JPS5660677A (en) 1979-10-23 1979-10-23 Ultrasonic washer

Country Status (1)

Country Link
JP (1) JPS5660677A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02257632A (en) * 1989-03-30 1990-10-18 Toshiba Corp Method and apparatus for cleaning of semiconductor device
JPH03126054U (en) * 1990-04-03 1991-12-19
JPH0587600U (en) * 1991-09-20 1993-11-26 石川島播磨重工業株式会社 Vitrification decontamination equipment
JP2017183553A (en) * 2016-03-30 2017-10-05 株式会社荏原製作所 Substrate cleaning device and substrate processing apparatus
JP2017195335A (en) * 2016-04-22 2017-10-26 株式会社荏原製作所 Substrate cleaning device
US11676827B2 (en) 2016-03-08 2023-06-13 Ebara Corporation Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02257632A (en) * 1989-03-30 1990-10-18 Toshiba Corp Method and apparatus for cleaning of semiconductor device
JPH03126054U (en) * 1990-04-03 1991-12-19
JPH0587600U (en) * 1991-09-20 1993-11-26 石川島播磨重工業株式会社 Vitrification decontamination equipment
US11676827B2 (en) 2016-03-08 2023-06-13 Ebara Corporation Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus
JP2017183553A (en) * 2016-03-30 2017-10-05 株式会社荏原製作所 Substrate cleaning device and substrate processing apparatus
JP2017195335A (en) * 2016-04-22 2017-10-26 株式会社荏原製作所 Substrate cleaning device

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