JPS5646303A - Aperture waveguide - Google Patents

Aperture waveguide

Info

Publication number
JPS5646303A
JPS5646303A JP12205179A JP12205179A JPS5646303A JP S5646303 A JPS5646303 A JP S5646303A JP 12205179 A JP12205179 A JP 12205179A JP 12205179 A JP12205179 A JP 12205179A JP S5646303 A JPS5646303 A JP S5646303A
Authority
JP
Japan
Prior art keywords
guide
waveguide
inner guide
spacer
lower side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12205179A
Other languages
Japanese (ja)
Other versions
JPS5943002B2 (en
Inventor
Toru Kanbara
Koji Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP54122051A priority Critical patent/JPS5943002B2/en
Publication of JPS5646303A publication Critical patent/JPS5646303A/en
Publication of JPS5943002B2 publication Critical patent/JPS5943002B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/70Feed lines
    • H05B6/707Feed lines using waveguides
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/642Cooling of the microwave components and related air circulation systems
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/70Feed lines

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Non-Reversible Transmitting Devices (AREA)
  • Waveguides (AREA)

Abstract

PURPOSE:To uniform the temperature in the guide and on the wall of the guide, by forming the return path of fluid with the section plate between the lower side of outer wall and the spacer of the lower side plate of the inner guide, in the waveguide suitable for the transmission and the radiation for large power of microwave wave for the heating of plasma by means of electromagnetic waves. CONSTITUTION:The electromagnetic waves incoming from the direction toward the arrow 1 propagate in the inner guide 2 of waveguide and radiate to the arrow 4 from the aperture of the open end 3. One set of aperture waveguide is constituted by a plurality of the unit parts 5 of the waveguide in bundle, and the spacer 7 is extended axially on the side wall 6 of the inner guide 2 and in the inner guide 2 itself. The waveguide outer guide 9 encloses the inner guide 6 so that the fluid path 8 can be formed with the spacer 7. Further, bwteen the lower side plate 10 of the outer guide 9 and the spacer 12 provided with the lower side plate 11 of the inner guide 6, the section plate 14 forms the fluid return path 13. Thus, the fluid for use of cooling can uniform the temperature on the guide wall in the guide.
JP54122051A 1979-09-25 1979-09-25 aperture waveguide Expired JPS5943002B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54122051A JPS5943002B2 (en) 1979-09-25 1979-09-25 aperture waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54122051A JPS5943002B2 (en) 1979-09-25 1979-09-25 aperture waveguide

Publications (2)

Publication Number Publication Date
JPS5646303A true JPS5646303A (en) 1981-04-27
JPS5943002B2 JPS5943002B2 (en) 1984-10-19

Family

ID=14826388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54122051A Expired JPS5943002B2 (en) 1979-09-25 1979-09-25 aperture waveguide

Country Status (1)

Country Link
JP (1) JPS5943002B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4757291A (en) * 1986-02-28 1988-07-12 Spinner Gmbh, Elektrotechnische Fabrik Cooled waveguide assembly
JPS6467908A (en) * 1987-09-08 1989-03-14 Sumitomo Metal Ind Plasma processing device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6115577U (en) * 1984-07-04 1986-01-29 日本センサ−株式会社 Automobile rear warning device
JPH01131825A (en) * 1987-11-17 1989-05-24 Matsushita Electric Ind Co Ltd Microwave heating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4757291A (en) * 1986-02-28 1988-07-12 Spinner Gmbh, Elektrotechnische Fabrik Cooled waveguide assembly
JPS6467908A (en) * 1987-09-08 1989-03-14 Sumitomo Metal Ind Plasma processing device
JP2625756B2 (en) * 1987-09-08 1997-07-02 住友金属工業株式会社 Plasma process equipment

Also Published As

Publication number Publication date
JPS5943002B2 (en) 1984-10-19

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