JPS5643818A - Surface elastic wave device and its manufacture - Google Patents
Surface elastic wave device and its manufactureInfo
- Publication number
- JPS5643818A JPS5643818A JP11797979A JP11797979A JPS5643818A JP S5643818 A JPS5643818 A JP S5643818A JP 11797979 A JP11797979 A JP 11797979A JP 11797979 A JP11797979 A JP 11797979A JP S5643818 A JPS5643818 A JP S5643818A
- Authority
- JP
- Japan
- Prior art keywords
- electrode fingers
- manufacture
- wave device
- elastic wave
- surface elastic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To reduce the conductor resistance of a bus bar part by constituting an input-output interdigital transducer by stacking an electrode finger end part and a single-layer bas bar much thicker than the electrode fingers. CONSTITUTION:On piezoelectric substrate 1, cross electrode fingers 2 are formed. Next, single-layer bus bars 3 are formed which are much thicker than cross electrode fingers 2 and less in natural resistance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11797979A JPS5643818A (en) | 1979-09-17 | 1979-09-17 | Surface elastic wave device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11797979A JPS5643818A (en) | 1979-09-17 | 1979-09-17 | Surface elastic wave device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5643818A true JPS5643818A (en) | 1981-04-22 |
Family
ID=14725002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11797979A Pending JPS5643818A (en) | 1979-09-17 | 1979-09-17 | Surface elastic wave device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5643818A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58178619A (en) * | 1982-04-13 | 1983-10-19 | Matsushita Electric Ind Co Ltd | Element for surface acoustic wave |
JPS62162208A (en) * | 1986-01-13 | 1987-07-18 | Pioneer Electronic Corp | Magnetic head |
JPS62117832U (en) * | 1986-01-14 | 1987-07-27 | ||
US6946931B2 (en) * | 2001-12-21 | 2005-09-20 | Fujitsu Limited | Surface acoustic wave resonator and surface acoustic wave filter |
WO2012076517A1 (en) * | 2010-12-07 | 2012-06-14 | Epcos Ag | Electroacoustic transducer with reduced losses due to transversal emission and improved performance due to suppression of transversal modes |
WO2016103953A1 (en) * | 2014-12-25 | 2016-06-30 | 株式会社村田製作所 | Acoustic wave device |
WO2018199071A1 (en) * | 2017-04-28 | 2018-11-01 | 株式会社村田製作所 | Acoustic wave device manufacturing method and acoustic wave device |
WO2024043343A1 (en) * | 2022-08-26 | 2024-02-29 | 株式会社村田製作所 | Acoustic wave device |
-
1979
- 1979-09-17 JP JP11797979A patent/JPS5643818A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58178619A (en) * | 1982-04-13 | 1983-10-19 | Matsushita Electric Ind Co Ltd | Element for surface acoustic wave |
JPS62162208A (en) * | 1986-01-13 | 1987-07-18 | Pioneer Electronic Corp | Magnetic head |
JPS62117832U (en) * | 1986-01-14 | 1987-07-27 | ||
US6946931B2 (en) * | 2001-12-21 | 2005-09-20 | Fujitsu Limited | Surface acoustic wave resonator and surface acoustic wave filter |
US9391256B2 (en) | 2010-12-07 | 2016-07-12 | Epcos Ag | Electroacoustic transducer with reduced losses due to transverse emission and improved performance due to suppression of transverse modes |
WO2012076517A1 (en) * | 2010-12-07 | 2012-06-14 | Epcos Ag | Electroacoustic transducer with reduced losses due to transversal emission and improved performance due to suppression of transversal modes |
JP2014500681A (en) * | 2010-12-07 | 2014-01-09 | エプコス アクチエンゲゼルシャフト | Electroacoustic transducer with reduced loss due to lateral emission and improved operation by suppressing lateral modes |
WO2016103953A1 (en) * | 2014-12-25 | 2016-06-30 | 株式会社村田製作所 | Acoustic wave device |
JPWO2016103953A1 (en) * | 2014-12-25 | 2017-08-03 | 株式会社村田製作所 | Elastic wave device |
US10256793B2 (en) | 2014-12-25 | 2019-04-09 | Murata Manufacturing Co., Ltd. | Elastic wave detection |
WO2018199071A1 (en) * | 2017-04-28 | 2018-11-01 | 株式会社村田製作所 | Acoustic wave device manufacturing method and acoustic wave device |
JPWO2018199071A1 (en) * | 2017-04-28 | 2019-12-19 | 株式会社村田製作所 | Method of manufacturing elastic wave device and elastic wave device |
WO2024043343A1 (en) * | 2022-08-26 | 2024-02-29 | 株式会社村田製作所 | Acoustic wave device |
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