JPS5638449U - - Google Patents

Info

Publication number: JPS5638449U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP12149979U

Other languages

Japanese (ja)

Other versions

JPS6350848Y2 (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1979-09-03

Filing date

1979-09-03

Publication date

1981-04-11

1979-09-03 Application filed filed Critical

1979-09-03 Priority to JP1979121499U priority Critical patent/JPS6350848Y2/ja

1981-04-11 Publication of JPS5638449U publication Critical patent/JPS5638449U/ja

1988-12-27 Application granted granted Critical

1988-12-27 Publication of JPS6350848Y2 publication Critical patent/JPS6350848Y2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Drying Of Semiconductors (AREA)

JP1979121499U 1979-09-03 1979-09-03 Expired JPS6350848Y2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1979121499U JPS6350848Y2 (en)	1979-09-03	1979-09-03

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1979121499U JPS6350848Y2 (en)	1979-09-03	1979-09-03

Publications (2)

Publication Number	Publication Date
JPS5638449U true JPS5638449U (en)	1981-04-11
JPS6350848Y2 JPS6350848Y2 (en)	1988-12-27

Family

ID=29353633

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1979121499U Expired JPS6350848Y2 (en)	1979-09-03	1979-09-03

Country Status (1)

Country	Link
JP (1)	JPS6350848Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2008136502A1 (en) *	2007-05-02	2008-11-13	Tokyo Electron Limited	Valve open/close operation check method, gas treatment device, and storage medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5176976A (en) *	1974-12-27	1976-07-03	Tokyo Shibaura Electric Co	KISOHANNO SOCHI
JPS54117177U (en) *	1978-01-31	1979-08-16

1979
- 1979-09-03 JP JP1979121499U patent/JPS6350848Y2/ja not_active Expired

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5176976A (en) *	1974-12-27	1976-07-03	Tokyo Shibaura Electric Co	KISOHANNO SOCHI
JPS54117177U (en) *	1978-01-31	1979-08-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2008136502A1 (en) *	2007-05-02	2008-11-13	Tokyo Electron Limited	Valve open/close operation check method, gas treatment device, and storage medium
JP2008277666A (en) *	2007-05-02	2008-11-13	Tokyo Electron Ltd	Valve switching operation checking method, gas processing apparatus, and storage medium

Also Published As

Publication number	Publication date
JPS6350848Y2 (en)	1988-12-27

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