JPS5632145A - Vacuum contact printing device - Google Patents
Vacuum contact printing deviceInfo
- Publication number
- JPS5632145A JPS5632145A JP12864479A JP12864479A JPS5632145A JP S5632145 A JPS5632145 A JP S5632145A JP 12864479 A JP12864479 A JP 12864479A JP 12864479 A JP12864479 A JP 12864479A JP S5632145 A JPS5632145 A JP S5632145A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- plate
- light
- printing device
- chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE:To improve the close contact characteristic between a transmittable plate, an original plate and a photosensitive material and enable good image copying free from any distortion etc. to be performed in a titled device by forming vacuum chambers between a flexible plate and the light transmittable plate and between the latter and a wall member, respectively. CONSTITUTION:In a vacuum contact printing device, the 1st vacuum chamber 8 is formed between a light transmittalble plate 9 and a flexible plate 11 and the 2nd vacuum chamber 10 between the flexible plate 11 and a wall member 14. Vacuum suction ports 16, 17 are provided to the 1st, 2nd vacuum chambers 8, 10. Further, means of exhausting air from both vacuum suction ports 16, 17 to simultaneously evacuate both vacuum chambers 8, 10 and stopping the air exhausting from the vacuum suction port 17 to release the vacuum of the 2nd vacuum chamber 10 after this are provided and a light source is installed above the light transmittalbe plate 9. Thereby, the reduction in the suction time and the improvement in the close contact characteristic may be achieved irrespective of the conditions of the original plate 6 and photosensitive material 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12864479A JPS5632145A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12864479A JPS5632145A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10795879A Division JPS5632134A (en) | 1979-08-24 | 1979-08-24 | Vacuum contact printing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5632145A true JPS5632145A (en) | 1981-04-01 |
Family
ID=14989909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12864479A Pending JPS5632145A (en) | 1979-10-05 | 1979-10-05 | Vacuum contact printing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5632145A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4549627A (en) * | 1982-06-25 | 1985-10-29 | Jidosha Kiki Co., Ltd. | Power steering apparatus |
US4610157A (en) * | 1984-12-11 | 1986-09-09 | United Technologies Corporation | Surface penetrant inspection test piece having varying thickness plating |
JPS62203174A (en) * | 1986-03-03 | 1987-09-07 | Hiromu Asada | Fine electrophotographic method |
-
1979
- 1979-10-05 JP JP12864479A patent/JPS5632145A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4549627A (en) * | 1982-06-25 | 1985-10-29 | Jidosha Kiki Co., Ltd. | Power steering apparatus |
US4610157A (en) * | 1984-12-11 | 1986-09-09 | United Technologies Corporation | Surface penetrant inspection test piece having varying thickness plating |
JPS62203174A (en) * | 1986-03-03 | 1987-09-07 | Hiromu Asada | Fine electrophotographic method |
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