JPS5622902A - Measuring method for thickness of transparent plate - Google Patents

Measuring method for thickness of transparent plate

Info

Publication number
JPS5622902A
JPS5622902A JP9855379A JP9855379A JPS5622902A JP S5622902 A JPS5622902 A JP S5622902A JP 9855379 A JP9855379 A JP 9855379A JP 9855379 A JP9855379 A JP 9855379A JP S5622902 A JPS5622902 A JP S5622902A
Authority
JP
Japan
Prior art keywords
stripes
transparent plate
interference
thickness
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9855379A
Other languages
Japanese (ja)
Inventor
Katsumi Kokubu
Masaharu Okafuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP9855379A priority Critical patent/JPS5622902A/en
Publication of JPS5622902A publication Critical patent/JPS5622902A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the thickness of a transparent plate with precision by slantingly irradiating the surface of the transparent plate with a laser focusing beam, by generating interference stripes of light reflected by the top and reverse surfaces of the plate, and then by counting the number of stripes.
CONSTITUTION: A laser beam from laser light source 2 over transparent plate 1 to be measured is projected slantingly on the surface of transparent plate 1 as projected beam 4 passed through optical system 3. Part of beam 4, after being diffused after beam waist (w), is reflected by surface 1a, and the other by reverse surface 1b, obtaining reflected beams 5 and 6. Mutual interference of a surge based on the optical path difference between both reflected beams 5 and 6 forms light interference stripes 7 at equal intervals where both reflected beams 5 and 6 overlap each other. In interference-formation space 8, two measurement points A and B are fixed crossing interference stripes 7 and the number of interference stripes 7 residing between both the points, so that plate thickness (d) can be measured by a contrast with the number of stripes of a reference thickness plate.
COPYRIGHT: (C)1981,JPO&Japio
JP9855379A 1979-08-01 1979-08-01 Measuring method for thickness of transparent plate Pending JPS5622902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9855379A JPS5622902A (en) 1979-08-01 1979-08-01 Measuring method for thickness of transparent plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9855379A JPS5622902A (en) 1979-08-01 1979-08-01 Measuring method for thickness of transparent plate

Publications (1)

Publication Number Publication Date
JPS5622902A true JPS5622902A (en) 1981-03-04

Family

ID=14222870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9855379A Pending JPS5622902A (en) 1979-08-01 1979-08-01 Measuring method for thickness of transparent plate

Country Status (1)

Country Link
JP (1) JPS5622902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4660980A (en) * 1983-12-13 1987-04-28 Anritsu Electric Company Limited Apparatus for measuring thickness of object transparent to light utilizing interferometric method
CN104964650A (en) * 2015-06-26 2015-10-07 南开大学 Method for measuring thickness of transparent spherical cavity container

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4660980A (en) * 1983-12-13 1987-04-28 Anritsu Electric Company Limited Apparatus for measuring thickness of object transparent to light utilizing interferometric method
CN104964650A (en) * 2015-06-26 2015-10-07 南开大学 Method for measuring thickness of transparent spherical cavity container

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