JPS5622368B2 - - Google Patents
Info
- Publication number
- JPS5622368B2 JPS5622368B2 JP14168075A JP14168075A JPS5622368B2 JP S5622368 B2 JPS5622368 B2 JP S5622368B2 JP 14168075 A JP14168075 A JP 14168075A JP 14168075 A JP14168075 A JP 14168075A JP S5622368 B2 JPS5622368 B2 JP S5622368B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
- H01L21/30635—Electrolytic etching of AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5157474A GB1469005A (en) | 1974-11-28 | 1974-11-28 | Standard telephones cables ltd semiconductor device manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5177074A JPS5177074A (en) | 1976-07-03 |
| JPS5622368B2 true JPS5622368B2 (en) | 1981-05-25 |
Family
ID=10460546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14168075A Granted JPS5177074A (en) | 1974-11-28 | 1975-11-28 | HANDOTAINOE TSUCHINGU |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5177074A (en) |
| DE (1) | DE2551444A1 (en) |
| GB (1) | GB1469005A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6047725B2 (en) * | 1977-06-14 | 1985-10-23 | ソニー株式会社 | Ferrite processing method |
| GB8426915D0 (en) * | 1984-10-24 | 1984-11-28 | Marconi Instruments Ltd | Fabricating devices on semiconductor substrates |
| EP0309782B1 (en) * | 1987-09-30 | 1994-06-01 | Siemens Aktiengesellschaft | Etching process for silicon (100) |
| US6401009B1 (en) | 1999-02-16 | 2002-06-04 | Suzette M. Chandonnet | Sundry article vending apparatus |
-
1974
- 1974-11-28 GB GB5157474A patent/GB1469005A/en not_active Expired
-
1975
- 1975-11-15 DE DE19752551444 patent/DE2551444A1/en active Pending
- 1975-11-28 JP JP14168075A patent/JPS5177074A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5177074A (en) | 1976-07-03 |
| DE2551444A1 (en) | 1976-08-12 |
| GB1469005A (en) | 1977-03-30 |