JPS5618400A - Shutter unit - Google Patents

Shutter unit

Info

Publication number
JPS5618400A
JPS5618400A JP9261679A JP9261679A JPS5618400A JP S5618400 A JPS5618400 A JP S5618400A JP 9261679 A JP9261679 A JP 9261679A JP 9261679 A JP9261679 A JP 9261679A JP S5618400 A JPS5618400 A JP S5618400A
Authority
JP
Japan
Prior art keywords
shutter unit
shutter
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9261679A
Other languages
Japanese (ja)
Inventor
Hidemasa Ishii
Masanao Shibui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP9261679A priority Critical patent/JPS5618400A/en
Publication of JPS5618400A publication Critical patent/JPS5618400A/en
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP9261679A 1979-07-23 1979-07-23 Shutter unit Pending JPS5618400A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9261679A JPS5618400A (en) 1979-07-23 1979-07-23 Shutter unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9261679A JPS5618400A (en) 1979-07-23 1979-07-23 Shutter unit

Publications (1)

Publication Number Publication Date
JPS5618400A true JPS5618400A (en) 1981-02-21

Family

ID=14059360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9261679A Pending JPS5618400A (en) 1979-07-23 1979-07-23 Shutter unit

Country Status (1)

Country Link
JP (1) JPS5618400A (en)

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