JPS5617820B2 - - Google Patents
Info
- Publication number
- JPS5617820B2 JPS5617820B2 JP3396776A JP3396776A JPS5617820B2 JP S5617820 B2 JPS5617820 B2 JP S5617820B2 JP 3396776 A JP3396776 A JP 3396776A JP 3396776 A JP3396776 A JP 3396776A JP S5617820 B2 JPS5617820 B2 JP S5617820B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3396776A JPS52116173A (en) | 1976-03-26 | 1976-03-26 | Exposure method by light beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3396776A JPS52116173A (en) | 1976-03-26 | 1976-03-26 | Exposure method by light beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52116173A JPS52116173A (en) | 1977-09-29 |
JPS5617820B2 true JPS5617820B2 (cs) | 1981-04-24 |
Family
ID=12401251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3396776A Granted JPS52116173A (en) | 1976-03-26 | 1976-03-26 | Exposure method by light beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52116173A (cs) |
-
1976
- 1976-03-26 JP JP3396776A patent/JPS52116173A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS52116173A (en) | 1977-09-29 |