JPS56152694A - Preventing device for vibration of hydroextractor - Google Patents

Preventing device for vibration of hydroextractor

Info

Publication number
JPS56152694A
JPS56152694A JP5719780A JP5719780A JPS56152694A JP S56152694 A JPS56152694 A JP S56152694A JP 5719780 A JP5719780 A JP 5719780A JP 5719780 A JP5719780 A JP 5719780A JP S56152694 A JPS56152694 A JP S56152694A
Authority
JP
Japan
Prior art keywords
hydroextractor
vibration
preventing device
preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5719780A
Other languages
Japanese (ja)
Inventor
Michiaki Itou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5719780A priority Critical patent/JPS56152694A/en
Publication of JPS56152694A publication Critical patent/JPS56152694A/en
Pending legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
JP5719780A 1980-04-30 1980-04-30 Preventing device for vibration of hydroextractor Pending JPS56152694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5719780A JPS56152694A (en) 1980-04-30 1980-04-30 Preventing device for vibration of hydroextractor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5719780A JPS56152694A (en) 1980-04-30 1980-04-30 Preventing device for vibration of hydroextractor

Publications (1)

Publication Number Publication Date
JPS56152694A true JPS56152694A (en) 1981-11-26

Family

ID=13048760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5719780A Pending JPS56152694A (en) 1980-04-30 1980-04-30 Preventing device for vibration of hydroextractor

Country Status (1)

Country Link
JP (1) JPS56152694A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144136A (en) * 1983-02-08 1984-08-18 Dainippon Screen Mfg Co Ltd Rotary washing apparatus for wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59144136A (en) * 1983-02-08 1984-08-18 Dainippon Screen Mfg Co Ltd Rotary washing apparatus for wafer
JPH0348651B2 (en) * 1983-02-08 1991-07-25 Dainippon Screen Mfg

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