JPS5614746B2 - - Google Patents
Info
- Publication number
- JPS5614746B2 JPS5614746B2 JP15468878A JP15468878A JPS5614746B2 JP S5614746 B2 JPS5614746 B2 JP S5614746B2 JP 15468878 A JP15468878 A JP 15468878A JP 15468878 A JP15468878 A JP 15468878A JP S5614746 B2 JPS5614746 B2 JP S5614746B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15468878A JPS5579870A (en) | 1978-12-14 | 1978-12-14 | Evaporation apparatus for substance in vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15468878A JPS5579870A (en) | 1978-12-14 | 1978-12-14 | Evaporation apparatus for substance in vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5579870A JPS5579870A (en) | 1980-06-16 |
| JPS5614746B2 true JPS5614746B2 (en) | 1981-04-06 |
Family
ID=15589745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15468878A Granted JPS5579870A (en) | 1978-12-14 | 1978-12-14 | Evaporation apparatus for substance in vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5579870A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132814U (en) * | 1986-02-17 | 1987-08-21 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004192903A (en) * | 2002-12-10 | 2004-07-08 | Prazmatec:Kk | Electron gun |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5743890Y2 (en) * | 1978-03-23 | 1982-09-28 | ||
| JPS54140065U (en) * | 1978-03-23 | 1979-09-28 |
-
1978
- 1978-12-14 JP JP15468878A patent/JPS5579870A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62132814U (en) * | 1986-02-17 | 1987-08-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5579870A (en) | 1980-06-16 |