JPS56147076A - Characteristic testing electrode - Google Patents

Characteristic testing electrode

Info

Publication number
JPS56147076A
JPS56147076A JP5038280A JP5038280A JPS56147076A JP S56147076 A JPS56147076 A JP S56147076A JP 5038280 A JP5038280 A JP 5038280A JP 5038280 A JP5038280 A JP 5038280A JP S56147076 A JPS56147076 A JP S56147076A
Authority
JP
Japan
Prior art keywords
electrode
subject
slight
tested
assured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5038280A
Other languages
Japanese (ja)
Inventor
Takafumi Kunishi
Tadashi Okubo
Takahisa Kamiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5038280A priority Critical patent/JPS56147076A/en
Publication of JPS56147076A publication Critical patent/JPS56147076A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To realize a compact electrode and ensure an assured measurement test, by tilting slight a bar-type testing electrode to the electrode of the subject to be tested when the electrodes touch each other so that the electrode shifts with a slight touch on the face of the electrode. CONSTITUTION:The insulating support block 6 which goes up and down by the cam mechanism 5 is attached to the post 4 set upright on the stage 3 onto which the subject to be tested or the electrode 2 of the test subject is set. The bar-type testing electrode 1 is attached to the block 6 with a slight inclination to the stage 3. With such characteristic electrode, the tip of the electrode 1 shifts slightly on the electrode 2 when touching the electrode 2. Thus the surface of the electrode 2 is scratched to remove the stains or oxide on the surface of electrode. As a result, an assured and accurate measurement test is made possible. Furthermore the electrode 1 is tilted slightly to the up-down direction to save the space and thus to obtain a compact electrode.
JP5038280A 1980-04-18 1980-04-18 Characteristic testing electrode Pending JPS56147076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5038280A JPS56147076A (en) 1980-04-18 1980-04-18 Characteristic testing electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5038280A JPS56147076A (en) 1980-04-18 1980-04-18 Characteristic testing electrode

Publications (1)

Publication Number Publication Date
JPS56147076A true JPS56147076A (en) 1981-11-14

Family

ID=12857314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5038280A Pending JPS56147076A (en) 1980-04-18 1980-04-18 Characteristic testing electrode

Country Status (1)

Country Link
JP (1) JPS56147076A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100138U (en) * 1984-12-05 1986-06-26
JPS63138728A (en) * 1986-11-29 1988-06-10 Toshiba Corp Appratus for forming electrode
JPH05326655A (en) * 1992-07-22 1993-12-10 Tokyo Electron Ltd Measuring method of semiconductor wafer
JPH07307367A (en) * 1994-05-09 1995-11-21 Tokyo Electron Ltd Wafer prober and measurement of semiconductor wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100138U (en) * 1984-12-05 1986-06-26
JPH0331077Y2 (en) * 1984-12-05 1991-07-01
JPS63138728A (en) * 1986-11-29 1988-06-10 Toshiba Corp Appratus for forming electrode
JPH05326655A (en) * 1992-07-22 1993-12-10 Tokyo Electron Ltd Measuring method of semiconductor wafer
JPH07307367A (en) * 1994-05-09 1995-11-21 Tokyo Electron Ltd Wafer prober and measurement of semiconductor wafer

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