JPS56146666A - Lapping device - Google Patents
Lapping deviceInfo
- Publication number
- JPS56146666A JPS56146666A JP4811380A JP4811380A JPS56146666A JP S56146666 A JPS56146666 A JP S56146666A JP 4811380 A JP4811380 A JP 4811380A JP 4811380 A JP4811380 A JP 4811380A JP S56146666 A JPS56146666 A JP S56146666A
- Authority
- JP
- Japan
- Prior art keywords
- gear
- fixers
- outer periphery
- fixer
- engages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
PURPOSE: To obtain products with high machining accuracy by controlling pressure and revolving speed which are given to a work at upper and lower fixers.
CONSTITUTION: The upper part of an upper fixer 1 is connected through a bearing 3 to a support shaft 4, disc carriers 5 are tucked between the upper fixer 1 and the lower fixer 2, holes 6 are provided for holding the work, and a gear 7 is provided at its outer periphery. An internal gear 8 is installed outside the upper and lower fixers 1, 2, which engages with the gear 7 at the outer periphery of the carrier. Besides, a sun gear 10 is installed in the center between the upper and lower fixers 1, 2, so that it engages with the gear 7 at the outer periphery of the carrier, and they are turned by a motor. And a detector 20 is provided between the upper and lower fixers 1, 2 in order to measure between the upper and lower fixers and to obtain products with high machining accuracy.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4811380A JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4811380A JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56146666A true JPS56146666A (en) | 1981-11-14 |
JPS639943B2 JPS639943B2 (en) | 1988-03-03 |
Family
ID=12794254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4811380A Granted JPS56146666A (en) | 1980-04-14 | 1980-04-14 | Lapping device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56146666A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62162464A (en) * | 1986-01-07 | 1987-07-18 | Hitachi Ltd | Lapping machine |
US5969521A (en) * | 1996-07-18 | 1999-10-19 | Speedfam Co., Ltd. | Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space |
JP2003089056A (en) * | 2001-09-12 | 2003-03-25 | Hamai Co Ltd | Workpiece thickness measuring method |
US7137867B2 (en) | 2005-02-25 | 2006-11-21 | Speedfam Co., Ltd. | Thickness control method and double side polisher |
US7147541B2 (en) | 2005-02-25 | 2006-12-12 | Speedfam Co., Ltd. | Thickness control method and double side polisher |
KR20220101346A (en) * | 2021-01-11 | 2022-07-19 | 에스케이실트론 주식회사 | Lapping carrier and lapping apparatus with it |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884991A (en) * | 1972-02-01 | 1973-11-10 |
-
1980
- 1980-04-14 JP JP4811380A patent/JPS56146666A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884991A (en) * | 1972-02-01 | 1973-11-10 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62162464A (en) * | 1986-01-07 | 1987-07-18 | Hitachi Ltd | Lapping machine |
US5969521A (en) * | 1996-07-18 | 1999-10-19 | Speedfam Co., Ltd. | Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space |
JP2003089056A (en) * | 2001-09-12 | 2003-03-25 | Hamai Co Ltd | Workpiece thickness measuring method |
US7137867B2 (en) | 2005-02-25 | 2006-11-21 | Speedfam Co., Ltd. | Thickness control method and double side polisher |
US7147541B2 (en) | 2005-02-25 | 2006-12-12 | Speedfam Co., Ltd. | Thickness control method and double side polisher |
KR20220101346A (en) * | 2021-01-11 | 2022-07-19 | 에스케이실트론 주식회사 | Lapping carrier and lapping apparatus with it |
Also Published As
Publication number | Publication date |
---|---|
JPS639943B2 (en) | 1988-03-03 |
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