JPS56142661A - Semiconductor integrated circuit and manufacture thereof - Google Patents
Semiconductor integrated circuit and manufacture thereofInfo
- Publication number
- JPS56142661A JPS56142661A JP4490180A JP4490180A JPS56142661A JP S56142661 A JPS56142661 A JP S56142661A JP 4490180 A JP4490180 A JP 4490180A JP 4490180 A JP4490180 A JP 4490180A JP S56142661 A JPS56142661 A JP S56142661A
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- base
- resistor
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
- H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
- H01L27/0233—Integrated injection logic structures [I2L]
- H01L27/0244—I2L structures integrated in combination with analog structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Bipolar Integrated Circuits (AREA)
- Bipolar Transistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To obtain an LSI having excellent high frequency characteristic by forming a resistance region simultaneously upon formation of the base region of an I<2>L and introducing impurity to the resistor simultaneously upon formation of the base of the second transistor. CONSTITUTION:An N<+> type buried region 21 and a P type buried region 22 are formed on a P type Si substrate 20. Then, an epitaxial layer 23 having 0.5-2OMEGAcm of N type specific resistance is formed thereon. Thereafter, a P type isolation region 24 is formed, and the base 25 of an I<2>L and a resistor region 25' are simultaneously formed. Subsequently, a P<+> type resistance region 27 having lower sheet resistance than the region 25', base region 26, injector region 28 and base contact region 29 of an NPN transistor are simultaneously formed. Then, emitter region 30, collector contact region 31 and collector region 32 are simultaneously formed by N<+> type diffusion. Since the junction capacity of the resistor can be reduced, a low resistor having preferable high frequency characteristic can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4490180A JPS56142661A (en) | 1980-04-04 | 1980-04-04 | Semiconductor integrated circuit and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4490180A JPS56142661A (en) | 1980-04-04 | 1980-04-04 | Semiconductor integrated circuit and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56142661A true JPS56142661A (en) | 1981-11-07 |
Family
ID=12704369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4490180A Pending JPS56142661A (en) | 1980-04-04 | 1980-04-04 | Semiconductor integrated circuit and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56142661A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4546539A (en) * | 1982-12-08 | 1985-10-15 | Harris Corporation | I2 L Structure and fabrication process compatible with high voltage bipolar transistors |
US5066602A (en) * | 1982-04-19 | 1991-11-19 | Matsushita Electric Industrial Co., Ltd. | Method of making semiconductor ic including polar transistors |
EP0521219A2 (en) * | 1991-07-01 | 1993-01-07 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for its fabrication |
US5661066A (en) * | 1980-12-17 | 1997-08-26 | Matsushita Electric Industrial Co., Ltd. | Semiconductor integrated circuit |
-
1980
- 1980-04-04 JP JP4490180A patent/JPS56142661A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5661066A (en) * | 1980-12-17 | 1997-08-26 | Matsushita Electric Industrial Co., Ltd. | Semiconductor integrated circuit |
US5066602A (en) * | 1982-04-19 | 1991-11-19 | Matsushita Electric Industrial Co., Ltd. | Method of making semiconductor ic including polar transistors |
US4546539A (en) * | 1982-12-08 | 1985-10-15 | Harris Corporation | I2 L Structure and fabrication process compatible with high voltage bipolar transistors |
EP0521219A2 (en) * | 1991-07-01 | 1993-01-07 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for its fabrication |
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