JPS56142071A - Ink jet nozzle plate - Google Patents

Ink jet nozzle plate

Info

Publication number
JPS56142071A
JPS56142071A JP4520780A JP4520780A JPS56142071A JP S56142071 A JPS56142071 A JP S56142071A JP 4520780 A JP4520780 A JP 4520780A JP 4520780 A JP4520780 A JP 4520780A JP S56142071 A JPS56142071 A JP S56142071A
Authority
JP
Japan
Prior art keywords
silicon
silicon substrate
nozzle
substrate
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4520780A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP4520780A priority Critical patent/JPS56142071A/en
Publication of JPS56142071A publication Critical patent/JPS56142071A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To obtain a nozzle plate of high mechanical strength having a high-precision nozzle by forming a groove which becomes a nozzle on one side of a silicon monocrystal substrate and overlapping another silicon substrate on the side where the said groove is formed to be joined together. CONSTITUTION:An SiO2 film 24 is formed on the upper surface of a silicon monocrystal substrate 21 whose face bearing A is (100). Then this silicon oxide film 24 is selectively etched and removed to form an opening 25. If the silicon substrate 21 is anisotropically etched through the opening 25, an etched face 26 having theta inclined at approximately 55 deg. with the surface of the silicon substrate 21 and a face bearing B at (111), is formed. The etching automatically comes to the end, forming a V- shaped groove 22 without any overetching. Later, the silicon oxide film 24 is removed and a silicon substrate 23 of te same size as the silicon substrate 21 is overlapped and then joined together. The precision of the width (dp) of the opening 25 depends on the printing accuracy of a mask, thus enabling the availability of an extremely high precision nozzle.
JP4520780A 1980-04-08 1980-04-08 Ink jet nozzle plate Pending JPS56142071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4520780A JPS56142071A (en) 1980-04-08 1980-04-08 Ink jet nozzle plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4520780A JPS56142071A (en) 1980-04-08 1980-04-08 Ink jet nozzle plate

Publications (1)

Publication Number Publication Date
JPS56142071A true JPS56142071A (en) 1981-11-06

Family

ID=12712815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4520780A Pending JPS56142071A (en) 1980-04-08 1980-04-08 Ink jet nozzle plate

Country Status (1)

Country Link
JP (1) JPS56142071A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479441A2 (en) * 1990-09-21 1992-04-08 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
JPH04117755U (en) * 1992-03-26 1992-10-21 富士通株式会社 inkjet head
DE4222140A1 (en) * 1992-07-06 1994-01-27 Heinzl Joachim Miniature aerostatic bearings
US5912684A (en) * 1990-09-21 1999-06-15 Seiko Epson Corporation Inkjet recording apparatus
US6113218A (en) * 1990-09-21 2000-09-05 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US6164759A (en) * 1990-09-21 2000-12-26 Seiko Epson Corporation Method for producing an electrostatic actuator and an inkjet head using it
US6168263B1 (en) 1990-09-21 2001-01-02 Seiko Epson Corporation Ink jet recording apparatus
CN108472773A (en) * 2015-11-13 2018-08-31 阿坎工具服务有限公司 Method for manufacturing tool or corresponding product

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0479441A2 (en) * 1990-09-21 1992-04-08 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US5513431A (en) * 1990-09-21 1996-05-07 Seiko Epson Corporation Method for producing the head of an ink jet recording apparatus
EP0479441B1 (en) * 1990-09-21 1998-02-25 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US5912684A (en) * 1990-09-21 1999-06-15 Seiko Epson Corporation Inkjet recording apparatus
US6113218A (en) * 1990-09-21 2000-09-05 Seiko Epson Corporation Ink-jet recording apparatus and method for producing the head thereof
US6117698A (en) * 1990-09-21 2000-09-12 Seiko Epson Corporation Method for producing the head of an ink-jet recording apparatus
US6164759A (en) * 1990-09-21 2000-12-26 Seiko Epson Corporation Method for producing an electrostatic actuator and an inkjet head using it
US6168263B1 (en) 1990-09-21 2001-01-02 Seiko Epson Corporation Ink jet recording apparatus
JPH04117755U (en) * 1992-03-26 1992-10-21 富士通株式会社 inkjet head
DE4222140A1 (en) * 1992-07-06 1994-01-27 Heinzl Joachim Miniature aerostatic bearings
CN108472773A (en) * 2015-11-13 2018-08-31 阿坎工具服务有限公司 Method for manufacturing tool or corresponding product
EP3374125A4 (en) * 2015-11-13 2019-07-17 Akaan Työvälinepalvelu Oy Method for manufacturing tool or corresponding product

Similar Documents

Publication Publication Date Title
US4961821A (en) Ode through holes and butt edges without edge dicing
JPS56142071A (en) Ink jet nozzle plate
JPS6468932A (en) Dry etching
JPS57130431A (en) Manufacture of semiconductor device
JPS5768809A (en) Silicon plate with v-groove and its manufacture
JPS56100443A (en) Manufacture of semiconductor device
JPS57118686A (en) Coupling of semiconductor laser and photo waveguide
JPS5572052A (en) Preparation of semiconductor device
JPS5478980A (en) Anisotropic etching method
JPS57136327A (en) Etching method
JPS56126460A (en) Nozzle plate for liquid injection
JPS56138941A (en) Forming method of wiring layer
JPS57100734A (en) Etching method for semiconductor substrate
JPS5461475A (en) Poly-film etching method
JPS55128830A (en) Method of working photoresist film
JPS6411399A (en) Etching of thin film pattern
JPS5633833A (en) Formation of positioning mark
JPS57104242A (en) Forming method for pattern for wiring
JPS5797629A (en) Manufacture of semiconductor device
JPS5588336A (en) Pattern formation by anisotropic etching reagent
JPS61224421A (en) Alignment of pattern
JPS52123171A (en) Anisotropic etching method of semiconductor single crystal
JPS6415976A (en) Manufacture of semiconductor device
JPS6449242A (en) Manufacture of semiconductor device
JPS57164563A (en) Manufacture of semiconductor device