JPS56140316A - Light deflecting element - Google Patents

Light deflecting element

Info

Publication number
JPS56140316A
JPS56140316A JP4438380A JP4438380A JPS56140316A JP S56140316 A JPS56140316 A JP S56140316A JP 4438380 A JP4438380 A JP 4438380A JP 4438380 A JP4438380 A JP 4438380A JP S56140316 A JPS56140316 A JP S56140316A
Authority
JP
Japan
Prior art keywords
movable part
spring
frame
coil pattern
deflecting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4438380A
Other languages
Japanese (ja)
Other versions
JPS6057052B2 (en
Inventor
Toshitsugu Ueda
Fusao Kosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP4438380A priority Critical patent/JPS6057052B2/en
Priority to US06/242,627 priority patent/US4421381A/en
Priority to GB8108973A priority patent/GB2075762B/en
Publication of JPS56140316A publication Critical patent/JPS56140316A/en
Publication of JPS6057052B2 publication Critical patent/JPS6057052B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Optical Transform (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To uniformalize quality and performance and lower cost by constituting a frame, springs coupling to this and a movable part supported by the spring with one substrate. CONSTITUTION:A frame 1 and a movable part 2 as well as spring part 31, 32 are constituted by one insulation substrate and their shapes are formed by making use of photolithographic (photoetching) techniques and etching techniques. If a coil pattern 5 is disposed in the magnetic field and current is flowed to the coil pattern 5 through lead wires 61, 62 and a jumper wire 60, the movable part 2 deflects with the spring part 31, 32 as axis, by which the light entering a reflective mirror 4 is deflected.
JP4438380A 1980-04-04 1980-04-04 light deflection element Expired JPS6057052B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP4438380A JPS6057052B2 (en) 1980-04-04 1980-04-04 light deflection element
US06/242,627 US4421381A (en) 1980-04-04 1981-03-11 Mechanical vibrating element
GB8108973A GB2075762B (en) 1980-04-04 1981-03-23 Mechanical vibrating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4438380A JPS6057052B2 (en) 1980-04-04 1980-04-04 light deflection element

Publications (2)

Publication Number Publication Date
JPS56140316A true JPS56140316A (en) 1981-11-02
JPS6057052B2 JPS6057052B2 (en) 1985-12-13

Family

ID=12689974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4438380A Expired JPS6057052B2 (en) 1980-04-04 1980-04-04 light deflection element

Country Status (1)

Country Link
JP (1) JPS6057052B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148741A (en) * 1980-04-17 1981-11-18 Nippon Columbia Co Ltd Galvanomirror device
JPS58105213A (en) * 1981-12-18 1983-06-23 Matsushima Kogyo Co Ltd Optical scanner
WO1995017698A1 (en) * 1993-12-20 1995-06-29 The Nippon Signal Co., Ltd. Planar galvanomirror and production method therefor
WO1995020774A1 (en) * 1994-01-31 1995-08-03 The Nippon Signal Co., Ltd. Planar type galvanomirror having a displacement detecting function and method for producing the same
JP2013092744A (en) * 2011-10-25 2013-05-16 Lemoptix Sa Actuator

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148741A (en) * 1980-04-17 1981-11-18 Nippon Columbia Co Ltd Galvanomirror device
JPH0128362B2 (en) * 1980-04-17 1989-06-02 Nippon Columbia
JPS58105213A (en) * 1981-12-18 1983-06-23 Matsushima Kogyo Co Ltd Optical scanner
JPH0449091B2 (en) * 1981-12-18 1992-08-10 Seiko Epson Corp
WO1995017698A1 (en) * 1993-12-20 1995-06-29 The Nippon Signal Co., Ltd. Planar galvanomirror and production method therefor
US5606447A (en) * 1993-12-20 1997-02-25 The Nippon Signal Co., Ltd. Planar type mirror galvanometer and method of manufacture
WO1995020774A1 (en) * 1994-01-31 1995-08-03 The Nippon Signal Co., Ltd. Planar type galvanomirror having a displacement detecting function and method for producing the same
US5767666A (en) * 1994-01-31 1998-06-16 The Nippon Signal Co., Ltd Planar type mirror galvanometer incorpotating a displacement detection function
JP2013092744A (en) * 2011-10-25 2013-05-16 Lemoptix Sa Actuator
US9467034B2 (en) 2011-10-25 2016-10-11 Intel Corporation Electromagnetic actuator for optical device to reduce temperature and deformation

Also Published As

Publication number Publication date
JPS6057052B2 (en) 1985-12-13

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