JPS56135153A - Laser-scan-type ultrasonic microscope - Google Patents

Laser-scan-type ultrasonic microscope

Info

Publication number
JPS56135153A
JPS56135153A JP3867380A JP3867380A JPS56135153A JP S56135153 A JPS56135153 A JP S56135153A JP 3867380 A JP3867380 A JP 3867380A JP 3867380 A JP3867380 A JP 3867380A JP S56135153 A JPS56135153 A JP S56135153A
Authority
JP
Japan
Prior art keywords
light absorbing
sample device
absorbing current
fault
oscilloscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3867380A
Other languages
Japanese (ja)
Other versions
JPS6337899B2 (en
Inventor
Masashi Nagase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP3867380A priority Critical patent/JPS56135153A/en
Publication of JPS56135153A publication Critical patent/JPS56135153A/en
Publication of JPS6337899B2 publication Critical patent/JPS6337899B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To improve fault analytical capacity by detecting a signal accompanied by a light absorbing current generating in a sample device through the irradiation of a laser beam indicating a light absorbing current image based on a signal accompanied by the detected light absorbing current. CONSTITUTION:A light absorbing current image is observed on an oscilloscope 36 under varying action conditions on a sample device 11 by changing input conditions against the sample device 11 in an input signal generation circuit 41. For this reason, it is possible to measure the electrical characteristics of the interior of the sample device 11 and further detect a fault under a static action state in respective input conditions by detecting a difference in the modulation degree of a light absorbing current. A sound image is indicated on the oscilloscope 24 and therefore, it is possible to observe a sound image and at the same time, observe a light absorbing current image. Thus the physical defect of the sample device 11 can be detected as well as the malfunction or fault of electrical characteristics.
JP3867380A 1980-03-26 1980-03-26 Laser-scan-type ultrasonic microscope Granted JPS56135153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3867380A JPS56135153A (en) 1980-03-26 1980-03-26 Laser-scan-type ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3867380A JPS56135153A (en) 1980-03-26 1980-03-26 Laser-scan-type ultrasonic microscope

Publications (2)

Publication Number Publication Date
JPS56135153A true JPS56135153A (en) 1981-10-22
JPS6337899B2 JPS6337899B2 (en) 1988-07-27

Family

ID=12531785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3867380A Granted JPS56135153A (en) 1980-03-26 1980-03-26 Laser-scan-type ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS56135153A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872052A (en) * 1981-10-27 1983-04-28 Noritoshi Nakabachi Reflection type ultrasonic microscope
JPS59107259A (en) * 1982-11-17 1984-06-21 ソノスカン，インコ−ポレ−テツド System and method of forming acoustic picture
JPS59111058A (en) * 1982-12-08 1984-06-27 ジヨ−ジ、マ−キン Structural analysis method and device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872052A (en) * 1981-10-27 1983-04-28 Noritoshi Nakabachi Reflection type ultrasonic microscope
JPS59107259A (en) * 1982-11-17 1984-06-21 ソノスカン，インコ−ポレ−テツド System and method of forming acoustic picture
JPS59111058A (en) * 1982-12-08 1984-06-27 ジヨ−ジ、マ−キン Structural analysis method and device

Also Published As

Publication number Publication date
JPS6337899B2 (en) 1988-07-27

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