JPS56129114A - Method of cutting monocrystal - Google Patents

Method of cutting monocrystal

Info

Publication number
JPS56129114A
JPS56129114A JP3264080A JP3264080A JPS56129114A JP S56129114 A JPS56129114 A JP S56129114A JP 3264080 A JP3264080 A JP 3264080A JP 3264080 A JP3264080 A JP 3264080A JP S56129114 A JPS56129114 A JP S56129114A
Authority
JP
Japan
Prior art keywords
monocrystal
cutting
cutting monocrystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3264080A
Other languages
Japanese (ja)
Other versions
JPH0115363B2 (en
Inventor
Masashi Harada
Ichirou Katou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3264080A priority Critical patent/JPS56129114A/en
Publication of JPS56129114A publication Critical patent/JPS56129114A/en
Publication of JPH0115363B2 publication Critical patent/JPH0115363B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP3264080A 1980-03-17 1980-03-17 Method of cutting monocrystal Granted JPS56129114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3264080A JPS56129114A (en) 1980-03-17 1980-03-17 Method of cutting monocrystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3264080A JPS56129114A (en) 1980-03-17 1980-03-17 Method of cutting monocrystal

Publications (2)

Publication Number Publication Date
JPS56129114A true JPS56129114A (en) 1981-10-09
JPH0115363B2 JPH0115363B2 (en) 1989-03-16

Family

ID=12364441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3264080A Granted JPS56129114A (en) 1980-03-17 1980-03-17 Method of cutting monocrystal

Country Status (1)

Country Link
JP (1) JPS56129114A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283508A (en) * 1985-06-11 1986-12-13 日立電線株式会社 Method of slicing semiconductor crystal ingot
JPH01171753A (en) * 1987-12-26 1989-07-06 Takatori Haitetsuku:Kk Wire saw
JPH09262825A (en) * 1996-03-29 1997-10-07 Shin Etsu Handotai Co Ltd Method of slicing semiconductor single crystal ingot
JP2004512251A (en) * 2000-10-20 2004-04-22 フライベルガー・コンパウンド・マテリアルズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング METHOD AND APPARATUS FOR CUTTING SINGLE CRYSTAL AND CONTROL DEVICE AND TEST METHOD FOR DETERMINING CRYSTAL ORIENTATION

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283508A (en) * 1985-06-11 1986-12-13 日立電線株式会社 Method of slicing semiconductor crystal ingot
JPH01171753A (en) * 1987-12-26 1989-07-06 Takatori Haitetsuku:Kk Wire saw
JPH09262825A (en) * 1996-03-29 1997-10-07 Shin Etsu Handotai Co Ltd Method of slicing semiconductor single crystal ingot
JP2004512251A (en) * 2000-10-20 2004-04-22 フライベルガー・コンパウンド・マテリアルズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング METHOD AND APPARATUS FOR CUTTING SINGLE CRYSTAL AND CONTROL DEVICE AND TEST METHOD FOR DETERMINING CRYSTAL ORIENTATION

Also Published As

Publication number Publication date
JPH0115363B2 (en) 1989-03-16

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