JPS56116873A - Heater for vacuum evaporation - Google Patents
Heater for vacuum evaporationInfo
- Publication number
- JPS56116873A JPS56116873A JP2042880A JP2042880A JPS56116873A JP S56116873 A JPS56116873 A JP S56116873A JP 2042880 A JP2042880 A JP 2042880A JP 2042880 A JP2042880 A JP 2042880A JP S56116873 A JPS56116873 A JP S56116873A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- vacuum evaporation
- evaporation
- wettability
- ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
PURPOSE:To enhance a evaporation speed of Au or Ag by coating a specific metal with a high m.p. to the surface of a heater of vacuum evaporation made of electroconductive ceramics by wire detonation spraying to make wettability of said heater with Au or Ag well. CONSTITUTION:The boat like and crucible like electroconductive heater made of ceramics as the heater of vacuum evaporation is prepared from ceramics based on TiB2 or BN or a carbon material such as graphite or the like. These materials are inferior to wettability with Au or Ag so that, in subjecting Au or Ag to vacuum evaporation, brought into a spherical shape and the evaporation speed thereof is low. In order to improve these problems, to a part contacted with Au or Ag molten by the aforementioned heater, at least one or more of a high m.p. metal such as W, Mo or Ta is coated by wire detonation spraying. Thereby, the wettability of the coating layer of said high m.p. metal and said molten Au or Ag is increased and the evaporation speed Au or Ag is increased to a large extent as well as the evaporation speed is also enhanced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2042880A JPS56116873A (en) | 1980-02-22 | 1980-02-22 | Heater for vacuum evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2042880A JPS56116873A (en) | 1980-02-22 | 1980-02-22 | Heater for vacuum evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56116873A true JPS56116873A (en) | 1981-09-12 |
Family
ID=12026760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2042880A Pending JPS56116873A (en) | 1980-02-22 | 1980-02-22 | Heater for vacuum evaporation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56116873A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2507304C1 (en) * | 2012-11-19 | 2014-02-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Омский государственный университет им. Ф.М. Достоевского" | Evaporator for vacuum application of thin films of metals and semiconductors |
-
1980
- 1980-02-22 JP JP2042880A patent/JPS56116873A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2507304C1 (en) * | 2012-11-19 | 2014-02-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Омский государственный университет им. Ф.М. Достоевского" | Evaporator for vacuum application of thin films of metals and semiconductors |
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