JPS56115944A - Detection device of panel plate defect - Google Patents

Detection device of panel plate defect

Info

Publication number
JPS56115944A
JPS56115944A JP1777780A JP1777780A JPS56115944A JP S56115944 A JPS56115944 A JP S56115944A JP 1777780 A JP1777780 A JP 1777780A JP 1777780 A JP1777780 A JP 1777780A JP S56115944 A JPS56115944 A JP S56115944A
Authority
JP
Japan
Prior art keywords
defect
back side
panel plate
spot
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1777780A
Other languages
Japanese (ja)
Other versions
JPS639177B2 (en
Inventor
Yasuo Hachikake
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP1777780A priority Critical patent/JPS56115944A/en
Publication of JPS56115944A publication Critical patent/JPS56115944A/en
Publication of JPS639177B2 publication Critical patent/JPS639177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To discriminate whereabout, the surface or the back side, of defect and make it possible to ascertain the quality on the separate basis by detecting the defect in the comparison of the spot image in the case of no defect with the spectrum spot dispersing in the range of wide angle in the case of existing the defect. CONSTITUTION:The laser beam from the laser light source is swept in the X-axial direction through a vibration mirror 3 to be further converged into a spot on the surface of the panel plate 5 through a projecting lens 4. Toward the Y-axial direction the scanning of the whole region is completed through the travelling of the panel plate 5. The reflected ray 2, namely the regular reflecting ray of the projection beam 2' is added to the photoelectric transducer 7 through a light receiving lens 6 after the spot image shielded by a mask 13. Simillarly on the back side of the panel plate 5 the transmission light is detected through the mask 13', light receiving lens 6' and the photoelectronic transducer 7' and through the output of the photoelectronic transducers 7 and 7' the discrimination of the surface or the back side is performed and besides the defect is detected through the separate criterion toward the surface or the back side. Thereby the defect on the back side having little influence on the quality of a product can be some extent neglected.
JP1777780A 1980-02-18 1980-02-18 Detection device of panel plate defect Granted JPS56115944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1777780A JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1777780A JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Publications (2)

Publication Number Publication Date
JPS56115944A true JPS56115944A (en) 1981-09-11
JPS639177B2 JPS639177B2 (en) 1988-02-26

Family

ID=11953140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1777780A Granted JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Country Status (1)

Country Link
JP (1) JPS56115944A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2524162A1 (en) * 1982-03-23 1983-09-30 Canon Kk APPARATUS AND METHOD FOR CONTROLLING NEGATIVES AND DEVICE FOR MASKING MASKS
JPS63241343A (en) * 1988-02-24 1988-10-06 Nikon Corp Defect inspector
EP0323564A2 (en) * 1988-01-04 1989-07-12 Erwin Sick GmbH Optik-Elektronik Optical device for the inspection of flaws
KR101103347B1 (en) * 2009-08-24 2012-01-05 삼성코닝정밀소재 주식회사 Detection apparatus for particle on the glass

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149232A (en) * 1974-07-27 1976-04-28 Beecham Group Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5149232A (en) * 1974-07-27 1976-04-28 Beecham Group Ltd

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2524162A1 (en) * 1982-03-23 1983-09-30 Canon Kk APPARATUS AND METHOD FOR CONTROLLING NEGATIVES AND DEVICE FOR MASKING MASKS
EP0323564A2 (en) * 1988-01-04 1989-07-12 Erwin Sick GmbH Optik-Elektronik Optical device for the inspection of flaws
EP0323564A3 (en) * 1988-01-04 1990-05-30 Erwin Sick GmbH Optik-Elektronik Optical device for the inspection of flaws
JPS63241343A (en) * 1988-02-24 1988-10-06 Nikon Corp Defect inspector
KR101103347B1 (en) * 2009-08-24 2012-01-05 삼성코닝정밀소재 주식회사 Detection apparatus for particle on the glass

Also Published As

Publication number Publication date
JPS639177B2 (en) 1988-02-26

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