JPS56112461A - Surface-coated superhard alloy material and its manufacture - Google Patents

Surface-coated superhard alloy material and its manufacture

Info

Publication number
JPS56112461A
JPS56112461A JP1461280A JP1461280A JPS56112461A JP S56112461 A JPS56112461 A JP S56112461A JP 1461280 A JP1461280 A JP 1461280A JP 1461280 A JP1461280 A JP 1461280A JP S56112461 A JPS56112461 A JP S56112461A
Authority
JP
Japan
Prior art keywords
compound
superhard alloy
layer
alloy material
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1461280A
Other languages
Japanese (ja)
Inventor
Moriaki Fuyama
Mitsuru Ura
Haruhiko Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1461280A priority Critical patent/JPS56112461A/en
Publication of JPS56112461A publication Critical patent/JPS56112461A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium

Abstract

PURPOSE:To manufacture trebly coated superhard alloy material excellent in cutting performance, by the continuous coating of heated superhard alloy substrate with a solid soln. composed of Hf compound and Ti compound, Ti compound, and metallic oxide in glow discharge under vacuum. CONSTITUTION:Superhard alloy substrate is heated at about 850-1,250 deg.C temp., and is subjected to glow discharge under vacuum while introducing mixed gas contg. one or more kinds among hydrocarbon, N2, NH3, CO2, H2 gas, with each of higher halogenide gas such as HfI2, TiI4, AlI3 etc. successively. Feeding paths for these mixed gases are changed in turn so as to coat the substrate continuously with the first layer of a solid soln. (Hf, Ti)C of Hf compound and Ti compound, the second layer or Ti compound such as TiC, and the third layer of metallic oxide such as Al2O3 in the same reaction system. This method allows to form each dense layer coating of desired thickness. Said surface-coated superhard alloy material is used for cutting tools and wear resistance parts.
JP1461280A 1980-02-08 1980-02-08 Surface-coated superhard alloy material and its manufacture Pending JPS56112461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1461280A JPS56112461A (en) 1980-02-08 1980-02-08 Surface-coated superhard alloy material and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1461280A JPS56112461A (en) 1980-02-08 1980-02-08 Surface-coated superhard alloy material and its manufacture

Publications (1)

Publication Number Publication Date
JPS56112461A true JPS56112461A (en) 1981-09-04

Family

ID=11866018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1461280A Pending JPS56112461A (en) 1980-02-08 1980-02-08 Surface-coated superhard alloy material and its manufacture

Country Status (1)

Country Link
JP (1) JPS56112461A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4625678A (en) * 1982-05-28 1986-12-02 Fujitsu Limited Apparatus for plasma chemical vapor deposition

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103409A (en) * 1978-02-01 1979-08-14 Sumitomo Electric Industries Surface coated superhard alloy member

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103409A (en) * 1978-02-01 1979-08-14 Sumitomo Electric Industries Surface coated superhard alloy member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4625678A (en) * 1982-05-28 1986-12-02 Fujitsu Limited Apparatus for plasma chemical vapor deposition

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