JPS5587322A - Manufacture of thin film magnetic head - Google Patents

Manufacture of thin film magnetic head

Info

Publication number
JPS5587322A
JPS5587322A JP15862578A JP15862578A JPS5587322A JP S5587322 A JPS5587322 A JP S5587322A JP 15862578 A JP15862578 A JP 15862578A JP 15862578 A JP15862578 A JP 15862578A JP S5587322 A JPS5587322 A JP S5587322A
Authority
JP
Japan
Prior art keywords
magnetic
gap
thin film
film
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15862578A
Other languages
Japanese (ja)
Inventor
Yoshio Takahashi
Yoshimasa Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15862578A priority Critical patent/JPS5587322A/en
Publication of JPS5587322A publication Critical patent/JPS5587322A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
    • G11B5/3179—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes
    • G11B5/3183—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps the films being mainly disposed in parallel planes intersecting the gap plane, e.g. "horizontal head structure"
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/488—Disposition of heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE: To obtain a thin film magnetic head possessing a high-accuracy gap by adding the taper to the gap edge of the 1st magnetic layer and then overlapping the gap edges of the nonmagnetic layer and the 2nd magnetic layer over the gap edge of the 1st magnetic layer.
CONSTITUTION: Both 1st and 2nd magnetic layers 14 and 15 are made to oppose to each other in the plane form via the nonmagnetic layer (not shown in the figure) to form gap 16. In the manufacture of such magnetic core 13, photoresist R1 is coated on a thin film of a magnetic material 14a formed on substrate P along with the patterning applied. After this, film 14a is etched into the taper form via the chemical etching solution. Then resist R1 is removed, and nonmagnetic layer 20 having the film thickness equal to the fixed gap measurement is formed. Furthermore, magnetic film 15a is formed on layer 20. Then photoresist R2 is coated with the patterning applied, and then the taper etching is given to film 15a to remove R2. Thus a thin film magnetic core with gap 16 formed between layers 14 and 15 is obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP15862578A 1978-12-25 1978-12-25 Manufacture of thin film magnetic head Pending JPS5587322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15862578A JPS5587322A (en) 1978-12-25 1978-12-25 Manufacture of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15862578A JPS5587322A (en) 1978-12-25 1978-12-25 Manufacture of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS5587322A true JPS5587322A (en) 1980-07-02

Family

ID=15675789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15862578A Pending JPS5587322A (en) 1978-12-25 1978-12-25 Manufacture of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS5587322A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164913A (en) * 1984-02-08 1985-08-28 Hitachi Ltd Thin film magnetic head
JPH0363912A (en) * 1989-08-02 1991-03-19 Hitachi Ltd Thin-film magnetic head and production thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164913A (en) * 1984-02-08 1985-08-28 Hitachi Ltd Thin film magnetic head
JPH0522962B2 (en) * 1984-02-08 1993-03-31 Hitachi Ltd
JPH0363912A (en) * 1989-08-02 1991-03-19 Hitachi Ltd Thin-film magnetic head and production thereof

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