JPS5580366U - - Google Patents
Info
- Publication number
- JPS5580366U JPS5580366U JP11767579U JP11767579U JPS5580366U JP S5580366 U JPS5580366 U JP S5580366U JP 11767579 U JP11767579 U JP 11767579U JP 11767579 U JP11767579 U JP 11767579U JP S5580366 U JPS5580366 U JP S5580366U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11767579U JPS5580366U (en) | 1979-08-27 | 1979-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11767579U JPS5580366U (en) | 1979-08-27 | 1979-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5580366U true JPS5580366U (en) | 1980-06-03 |
Family
ID=29071335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11767579U Pending JPS5580366U (en) | 1979-08-27 | 1979-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5580366U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01283367A (en) * | 1988-05-09 | 1989-11-14 | Mitsubishi Metal Corp | Production of target for sputtering |
WO2014057608A1 (en) * | 2012-10-12 | 2014-04-17 | 株式会社神戸製鋼所 | Pvd treatment method and pvd treatment device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5156788A (en) * | 1974-11-14 | 1976-05-18 | Nichiden Varian Kk | SUPATSUTA SOCHOTAAGETSUTODENKYOKU |
-
1979
- 1979-08-27 JP JP11767579U patent/JPS5580366U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5156788A (en) * | 1974-11-14 | 1976-05-18 | Nichiden Varian Kk | SUPATSUTA SOCHOTAAGETSUTODENKYOKU |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01283367A (en) * | 1988-05-09 | 1989-11-14 | Mitsubishi Metal Corp | Production of target for sputtering |
WO2014057608A1 (en) * | 2012-10-12 | 2014-04-17 | 株式会社神戸製鋼所 | Pvd treatment method and pvd treatment device |