JPS5560806A - Inspecting method for pattern - Google Patents
Inspecting method for patternInfo
- Publication number
- JPS5560806A JPS5560806A JP13361078A JP13361078A JPS5560806A JP S5560806 A JPS5560806 A JP S5560806A JP 13361078 A JP13361078 A JP 13361078A JP 13361078 A JP13361078 A JP 13361078A JP S5560806 A JPS5560806 A JP S5560806A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- width
- edges
- memorized
- read
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/10—Image acquisition
- G06V10/12—Details of acquisition arrangements; Constructional details thereof
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/10—Image acquisition
- G06V10/12—Details of acquisition arrangements; Constructional details thereof
- G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
- G06V10/145—Illumination specially adapted for pattern recognition, e.g. using gratings
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Multimedia (AREA)
- Theoretical Computer Science (AREA)
- Artificial Intelligence (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To determine the direction of a pattern line automatically and measure the width of the pattern automatically by memorizing optically scanned and detected pattern lines separately at every given angular domain and calculating the widths between the memorized pattern edges.
CONSTITUTION: The scanning laser rays penetrating a tested sample 6 are received and detected by a photo detector 9 and an angle detecting photo detector 10 where photo detecting elements are arranged fanwise around the photo detector 9. Angles of the pattern lines of the sample 6 such as 0°, 45°, 90°, 135°, etc. are determined by a pattern angle detecting circuit 11 and the pattern edges are separated and memorized at every given angular domain of the pattern edge signal memory circuit 12. If these separated and memorized pattern edges are read in the rectangular direction by a pttern width measuring circuit 13 and treated with read signals and a shift register, etc., the width of both pattern edges is calculated and the width of a pattern can be measured automatically according the automatic discrimination in the pattern line direction. In addition, if part of read pattern edge signals are short within a given width, contents of memory are changed in order to interpolate the the short part.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53133610A JPS593681B2 (en) | 1978-10-30 | 1978-10-30 | Pattern inspection method |
PCT/JP1979/000271 WO1980001002A1 (en) | 1978-10-30 | 1979-10-25 | Pattern inspection system |
DE19792953303 DE2953303C2 (en) | 1978-10-30 | 1979-10-25 | Pattern verification system |
US06/197,345 US4392120A (en) | 1978-10-30 | 1979-10-25 | Pattern inspection system |
ES79485536A ES485536A1 (en) | 1978-10-30 | 1979-10-30 | Pattern inspection system |
US06/428,605 US4547895A (en) | 1978-10-30 | 1982-09-30 | Pattern inspection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53133610A JPS593681B2 (en) | 1978-10-30 | 1978-10-30 | Pattern inspection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5560806A true JPS5560806A (en) | 1980-05-08 |
JPS593681B2 JPS593681B2 (en) | 1984-01-25 |
Family
ID=15108821
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53133610A Expired JPS593681B2 (en) | 1978-10-30 | 1978-10-30 | Pattern inspection method |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS593681B2 (en) |
DE (1) | DE2953303C2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10448722B2 (en) | 2017-03-22 | 2019-10-22 | Dyson Technology Limited | Support for a hair care appliance |
US10582751B2 (en) | 2017-03-22 | 2020-03-10 | Dyson Technology Limited | Support for a hair care appliance |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6052021A (en) * | 1983-08-31 | 1985-03-23 | Canon Inc | Apparatus and method for detecting position |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5324233A (en) | 1976-08-19 | 1978-03-06 | Fujitsu Ltd | Pattern examination system |
US4242702A (en) * | 1976-12-01 | 1980-12-30 | Hitachi, Ltd. | Apparatus for automatically checking external appearance of object |
DE2700252C2 (en) * | 1977-01-05 | 1985-03-14 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Procedure for checking defined structures |
-
1978
- 1978-10-30 JP JP53133610A patent/JPS593681B2/en not_active Expired
-
1979
- 1979-10-25 DE DE19792953303 patent/DE2953303C2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10448722B2 (en) | 2017-03-22 | 2019-10-22 | Dyson Technology Limited | Support for a hair care appliance |
US10582751B2 (en) | 2017-03-22 | 2020-03-10 | Dyson Technology Limited | Support for a hair care appliance |
Also Published As
Publication number | Publication date |
---|---|
DE2953303C2 (en) | 1987-04-16 |
JPS593681B2 (en) | 1984-01-25 |
DE2953303T1 (en) | 1980-12-18 |
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