JPS5560806A - Inspecting method for pattern - Google Patents

Inspecting method for pattern

Info

Publication number
JPS5560806A
JPS5560806A JP13361078A JP13361078A JPS5560806A JP S5560806 A JPS5560806 A JP S5560806A JP 13361078 A JP13361078 A JP 13361078A JP 13361078 A JP13361078 A JP 13361078A JP S5560806 A JPS5560806 A JP S5560806A
Authority
JP
Japan
Prior art keywords
pattern
width
edges
memorized
read
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13361078A
Other languages
Japanese (ja)
Other versions
JPS593681B2 (en
Inventor
Kikuo Mita
Masayuki Oyama
Taku Yoshida
Masahito Nakajima
Katsumi Fujiwara
Tadao Nakakuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP53133610A priority Critical patent/JPS593681B2/en
Priority to PCT/JP1979/000271 priority patent/WO1980001002A1/en
Priority to DE19792953303 priority patent/DE2953303C2/en
Priority to US06/197,345 priority patent/US4392120A/en
Priority to ES79485536A priority patent/ES485536A1/en
Publication of JPS5560806A publication Critical patent/JPS5560806A/en
Priority to US06/428,605 priority patent/US4547895A/en
Publication of JPS593681B2 publication Critical patent/JPS593681B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition
    • G06V10/12—Details of acquisition arrangements; Constructional details thereof
    • G06V10/14—Optical characteristics of the device performing the acquisition or on the illumination arrangements
    • G06V10/145—Illumination specially adapted for pattern recognition, e.g. using gratings

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To determine the direction of a pattern line automatically and measure the width of the pattern automatically by memorizing optically scanned and detected pattern lines separately at every given angular domain and calculating the widths between the memorized pattern edges.
CONSTITUTION: The scanning laser rays penetrating a tested sample 6 are received and detected by a photo detector 9 and an angle detecting photo detector 10 where photo detecting elements are arranged fanwise around the photo detector 9. Angles of the pattern lines of the sample 6 such as 0°, 45°, 90°, 135°, etc. are determined by a pattern angle detecting circuit 11 and the pattern edges are separated and memorized at every given angular domain of the pattern edge signal memory circuit 12. If these separated and memorized pattern edges are read in the rectangular direction by a pttern width measuring circuit 13 and treated with read signals and a shift register, etc., the width of both pattern edges is calculated and the width of a pattern can be measured automatically according the automatic discrimination in the pattern line direction. In addition, if part of read pattern edge signals are short within a given width, contents of memory are changed in order to interpolate the the short part.
COPYRIGHT: (C)1980,JPO&Japio
JP53133610A 1978-10-30 1978-10-30 Pattern inspection method Expired JPS593681B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP53133610A JPS593681B2 (en) 1978-10-30 1978-10-30 Pattern inspection method
PCT/JP1979/000271 WO1980001002A1 (en) 1978-10-30 1979-10-25 Pattern inspection system
DE19792953303 DE2953303C2 (en) 1978-10-30 1979-10-25 Pattern verification system
US06/197,345 US4392120A (en) 1978-10-30 1979-10-25 Pattern inspection system
ES79485536A ES485536A1 (en) 1978-10-30 1979-10-30 Pattern inspection system
US06/428,605 US4547895A (en) 1978-10-30 1982-09-30 Pattern inspection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53133610A JPS593681B2 (en) 1978-10-30 1978-10-30 Pattern inspection method

Publications (2)

Publication Number Publication Date
JPS5560806A true JPS5560806A (en) 1980-05-08
JPS593681B2 JPS593681B2 (en) 1984-01-25

Family

ID=15108821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53133610A Expired JPS593681B2 (en) 1978-10-30 1978-10-30 Pattern inspection method

Country Status (2)

Country Link
JP (1) JPS593681B2 (en)
DE (1) DE2953303C2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10448722B2 (en) 2017-03-22 2019-10-22 Dyson Technology Limited Support for a hair care appliance
US10582751B2 (en) 2017-03-22 2020-03-10 Dyson Technology Limited Support for a hair care appliance

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6052021A (en) * 1983-08-31 1985-03-23 Canon Inc Apparatus and method for detecting position

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324233A (en) 1976-08-19 1978-03-06 Fujitsu Ltd Pattern examination system
US4242702A (en) * 1976-12-01 1980-12-30 Hitachi, Ltd. Apparatus for automatically checking external appearance of object
DE2700252C2 (en) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Procedure for checking defined structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10448722B2 (en) 2017-03-22 2019-10-22 Dyson Technology Limited Support for a hair care appliance
US10582751B2 (en) 2017-03-22 2020-03-10 Dyson Technology Limited Support for a hair care appliance

Also Published As

Publication number Publication date
DE2953303C2 (en) 1987-04-16
JPS593681B2 (en) 1984-01-25
DE2953303T1 (en) 1980-12-18

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