JPS556066A - Production of fluid passage - Google Patents

Production of fluid passage

Info

Publication number
JPS556066A
JPS556066A JP7933878A JP7933878A JPS556066A JP S556066 A JPS556066 A JP S556066A JP 7933878 A JP7933878 A JP 7933878A JP 7933878 A JP7933878 A JP 7933878A JP S556066 A JPS556066 A JP S556066A
Authority
JP
Japan
Prior art keywords
copper
fluid passages
resist
photo
passages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7933878A
Other languages
Japanese (ja)
Other versions
JPS6115155B2 (en
Inventor
Yoshiharu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP7933878A priority Critical patent/JPS556066A/en
Publication of JPS556066A publication Critical patent/JPS556066A/en
Publication of JPS6115155B2 publication Critical patent/JPS6115155B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To form small fluid passages at low cost by embedding an element which can be etched by a specified etching means and etching the element. CONSTITUTION:An upper cover 26 made of titanium is prepared (a). A photo- resist 30 is applied on the cover 26 and exposure and development are conducted to form a desired pattern (b). Copper 31 is plated at the portions where fluid passages 25 are to be formed (c). The photo-resist 30 is removed (d). A main body is molded by use of a mold and water glass 32 represented by the formula Na2SiO4- 4H2O or the like (e). The copper 31 is etched away by use of ferric chloride (f). Because the copper 31 is placed where the fluid passages 25 are to be formed before the surrounding is formed, such troubles as clogging by coming out of an adhesive or the like into the passages 25 can be obviated and yield and reliability are enhanced.
JP7933878A 1978-06-29 1978-06-29 Production of fluid passage Granted JPS556066A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7933878A JPS556066A (en) 1978-06-29 1978-06-29 Production of fluid passage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7933878A JPS556066A (en) 1978-06-29 1978-06-29 Production of fluid passage

Publications (2)

Publication Number Publication Date
JPS556066A true JPS556066A (en) 1980-01-17
JPS6115155B2 JPS6115155B2 (en) 1986-04-22

Family

ID=13687106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7933878A Granted JPS556066A (en) 1978-06-29 1978-06-29 Production of fluid passage

Country Status (1)

Country Link
JP (1) JPS556066A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133340U (en) * 1988-12-16 1990-11-06

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4822072A (en) * 1971-07-23 1973-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4822072A (en) * 1971-07-23 1973-03-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02133340U (en) * 1988-12-16 1990-11-06

Also Published As

Publication number Publication date
JPS6115155B2 (en) 1986-04-22

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