JPS5555524A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS5555524A JPS5555524A JP12879978A JP12879978A JPS5555524A JP S5555524 A JPS5555524 A JP S5555524A JP 12879978 A JP12879978 A JP 12879978A JP 12879978 A JP12879978 A JP 12879978A JP S5555524 A JPS5555524 A JP S5555524A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- diffusion
- furnace
- push
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent contamination and crystal defects, by performing the diffusion and push-in diffusion of impurities, oxidation, anneaing, etc. in an identical furnace while controlling the temperature therein.
CONSTITUTION: A process in which a semiconductor substrate is set in a furnace at a low temperature of such a degree as to exert no influence upon the crystallizing property of the substrate; the temperature is gradually raised; and an impurity is diffused at a prescribed temperature to produce a diffused region, a push-in diffusion process, an oxidation process, an annealing process, etc. are sequentially effected in the same furnace.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12879978A JPS5555524A (en) | 1978-10-19 | 1978-10-19 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12879978A JPS5555524A (en) | 1978-10-19 | 1978-10-19 | Method of manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5555524A true JPS5555524A (en) | 1980-04-23 |
Family
ID=14993713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12879978A Pending JPS5555524A (en) | 1978-10-19 | 1978-10-19 | Method of manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5555524A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5815269A (en) * | 1981-07-21 | 1983-01-28 | Yamagata Nippon Denki Kk | Manufacture of semiconductor element |
-
1978
- 1978-10-19 JP JP12879978A patent/JPS5555524A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5815269A (en) * | 1981-07-21 | 1983-01-28 | Yamagata Nippon Denki Kk | Manufacture of semiconductor element |
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