JPS5554939U - - Google Patents
Info
- Publication number
- JPS5554939U JPS5554939U JP13794278U JP13794278U JPS5554939U JP S5554939 U JPS5554939 U JP S5554939U JP 13794278 U JP13794278 U JP 13794278U JP 13794278 U JP13794278 U JP 13794278U JP S5554939 U JPS5554939 U JP S5554939U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794278U JPS5554939U (ja) | 1978-10-09 | 1978-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794278U JPS5554939U (ja) | 1978-10-09 | 1978-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5554939U true JPS5554939U (ja) | 1980-04-14 |
Family
ID=29110637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794278U Pending JPS5554939U (ja) | 1978-10-09 | 1978-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5554939U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52126177A (en) * | 1976-04-15 | 1977-10-22 | Hitachi Ltd | Etching device |
| JPS52127762A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Etching method |
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1978
- 1978-10-09 JP JP13794278U patent/JPS5554939U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52126177A (en) * | 1976-04-15 | 1977-10-22 | Hitachi Ltd | Etching device |
| JPS52127762A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Etching method |