JPS5554438A - Pinhole detecting method for chemical vapor-deposition film - Google Patents
Pinhole detecting method for chemical vapor-deposition filmInfo
- Publication number
- JPS5554438A JPS5554438A JP12819778A JP12819778A JPS5554438A JP S5554438 A JPS5554438 A JP S5554438A JP 12819778 A JP12819778 A JP 12819778A JP 12819778 A JP12819778 A JP 12819778A JP S5554438 A JPS5554438 A JP S5554438A
- Authority
- JP
- Japan
- Prior art keywords
- film
- chemical vapor
- silicon dioxide
- pinholes
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12819778A JPS5554438A (en) | 1978-10-17 | 1978-10-17 | Pinhole detecting method for chemical vapor-deposition film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12819778A JPS5554438A (en) | 1978-10-17 | 1978-10-17 | Pinhole detecting method for chemical vapor-deposition film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5554438A true JPS5554438A (en) | 1980-04-21 |
Family
ID=14978852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12819778A Pending JPS5554438A (en) | 1978-10-17 | 1978-10-17 | Pinhole detecting method for chemical vapor-deposition film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5554438A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01276064A (en) * | 1988-04-27 | 1989-11-06 | Eagle Ind Co Ltd | Detecting device for pin hole of plating |
JP2007080924A (en) * | 2005-09-12 | 2007-03-29 | Showa Denko Kk | Manufacturing method of semiconductor light emitting element |
JP2009294044A (en) * | 2008-06-04 | 2009-12-17 | Fuji Electric Device Technology Co Ltd | Method for manufacturing semiconductor device |
CN104851820A (en) * | 2014-02-19 | 2015-08-19 | 北大方正集团有限公司 | Semiconductor device defect detection method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5853859A (en) * | 1981-09-26 | 1983-03-30 | Matsushita Electric Ind Co Ltd | Integrated thin film element |
-
1978
- 1978-10-17 JP JP12819778A patent/JPS5554438A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5853859A (en) * | 1981-09-26 | 1983-03-30 | Matsushita Electric Ind Co Ltd | Integrated thin film element |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01276064A (en) * | 1988-04-27 | 1989-11-06 | Eagle Ind Co Ltd | Detecting device for pin hole of plating |
JP2007080924A (en) * | 2005-09-12 | 2007-03-29 | Showa Denko Kk | Manufacturing method of semiconductor light emitting element |
JP2009294044A (en) * | 2008-06-04 | 2009-12-17 | Fuji Electric Device Technology Co Ltd | Method for manufacturing semiconductor device |
CN104851820A (en) * | 2014-02-19 | 2015-08-19 | 北大方正集团有限公司 | Semiconductor device defect detection method |
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